| ANTOŠ, Roman, Ivan OHLÍDAL, Daniel FRANTA, Petr KLAPETEK, Jan MISTÍK, Tomuo YAMAGUCHI and Štefan VIŠŇOVSKÝ. Spectroscopic ellipsometry of sinusoidal surface-relief gratings. Applied Surface Science. USA: ELSEVIER (NORTH-HOLLAND), 2005, vol. 244, 1-4, p. 221-224. ISSN 0169-4332. |
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@article{621445,
author = {Antoš, Roman and Ohlídal, Ivan and Franta, Daniel and Klapetek, Petr and Mistík, Jan and Yamaguchi, Tomuo and Višňovský, Štefan},
article_location = {USA},
article_number = {1-4},
keywords = {Optical metrology; Spekroscopic ellipsometry; Sinusoidal gratings; Wood anomaly; RCWA; Incoherent light},
language = {eng},
issn = {0169-4332},
journal = {Applied Surface Science},
title = {Spectroscopic ellipsometry of sinusoidal surface-relief gratings},
url = {http://hydra.physics.muni.cz/~franta/bib/ASS244_221.html},
volume = {244},
year = {2005}
}
TY - JOUR
ID - 621445
AU - Antoš, Roman - Ohlídal, Ivan - Franta, Daniel - Klapetek, Petr - Mistík, Jan - Yamaguchi, Tomuo - Višňovský, Štefan
PY - 2005
TI - Spectroscopic ellipsometry of sinusoidal surface-relief gratings
JF - Applied Surface Science
VL - 244
IS - 1-4
SP - 221-224
EP - 221-224
PB - ELSEVIER (NORTH-HOLLAND)
SN - 01694332
KW - Optical metrology
KW - Spekroscopic ellipsometry
KW - Sinusoidal gratings
KW - Wood anomaly
KW - RCWA
KW - Incoherent light
UR - http://hydra.physics.muni.cz/~franta/bib/ASS244_221.html
N2 - Spectroscopic ellipsometry (SE) is used to study a sinusoidal-relief grating fabricated on a surface of transparent polymer. An optically thick polymer layer is situated on a glass substrate and its refraction index is optically matched to the index of the glass. The rigorous coupled-wave analysis, implemented as the airy-like internal reflection series, is applied to calculate the optical response of the relief grating. The entire optical response of the sample is determined by employing incoherent backreflections at the interface between the polymer and the glass. The parameters describing the dimensions and the real shape of the sine-like relief, as well as the quality of the optical matching between the polymer and the glass, are determined using SE together with atomic force microscopy as a complementary technique.
ER -
ANTOŠ, Roman, Ivan OHLÍDAL, Daniel FRANTA, Petr KLAPETEK, Jan MISTÍK, Tomuo YAMAGUCHI and Štefan VIŠŇOVSKÝ. Spectroscopic ellipsometry of sinusoidal surface-relief gratings. \textit{Applied Surface Science}. USA: ELSEVIER (NORTH-HOLLAND), 2005, vol.~244, 1-4, p.~221-224. ISSN~0169-4332.
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