FRANTA, Daniel, Ivan OHLÍDAL, Jan MISTÍK, Tomuo YAMAGUCHI, Gu Jin HU and Ning DAI. Optical characterization of sol-gel deposited PZT thin films by spectroscopic ellipsometry and reflectometry in near-UV and visible regions. Applied Surface Science. USA: ELSEVIER (NORTH-HOLLAND), 2005, vol. 244, 1-4, p. 338-342. ISSN 0169-4332. |
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@article{621464, author = {Franta, Daniel and Ohlídal, Ivan and Mistík, Jan and Yamaguchi, Tomuo and Hu, Gu Jin and Dai, Ning}, article_location = {USA}, article_number = {1-4}, keywords = {PZT films; Optical constants; Ellipsometry; Reflectometry}, language = {eng}, issn = {0169-4332}, journal = {Applied Surface Science}, title = {Optical characterization of sol-gel deposited PZT thin films by spectroscopic ellipsometry and reflectometry in near-UV and visible regions}, url = {http://hydra.physics.muni.cz/~franta/bib/ASS244_338.html}, volume = {244}, year = {2005} }
TY - JOUR ID - 621464 AU - Franta, Daniel - Ohlídal, Ivan - Mistík, Jan - Yamaguchi, Tomuo - Hu, Gu Jin - Dai, Ning PY - 2005 TI - Optical characterization of sol-gel deposited PZT thin films by spectroscopic ellipsometry and reflectometry in near-UV and visible regions JF - Applied Surface Science VL - 244 IS - 1-4 SP - 338-342 EP - 338-342 PB - ELSEVIER (NORTH-HOLLAND) SN - 01694332 KW - PZT films KW - Optical constants KW - Ellipsometry KW - Reflectometry UR - http://hydra.physics.muni.cz/~franta/bib/ASS244_338.html N2 - In this paper the results concerning the optical characterization of the PZT film are presented. The multi-sample modification of the optical method based on combining variable angle spectroscopic ellipsometry and near-normal spectroscopic reflectometry is used to obtain the spectral dependences of the optical constants of this film within the spectral region 190-1000 nm. Within the near-UV region the sharp features of the spectral dependences of the optical constants are found. These features are explained by the existence of the narrow bands of the 4d and 3d valence electrons of the transition metals Zr and Ti. Within the optical characterization of the PZT film the defects consisting of boundary roughness and refractive index profile are respected. ER -
FRANTA, Daniel, Ivan OHLÍDAL, Jan MISTÍK, Tomuo YAMAGUCHI, Gu Jin HU and Ning DAI. Optical characterization of sol-gel deposited PZT thin films by spectroscopic ellipsometry and reflectometry in near-UV and visible regions. \textit{Applied Surface Science}. USA: ELSEVIER (NORTH-HOLLAND), 2005, vol.~244, 1-4, p.~338-342. ISSN~0169-4332.
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