MISTRÍK, Jan, Tomuo YAMAGUCHI, Daniel FRANTA, Ivan OHLÍDAL, Gu Jin HU and Ning DAI. Optical properties of slightly rough LaNiO3 thin films studied by spectroscopic ellipsometry and reflectometry. Applied Surface Science. USA: ELSEVIER (NORTH-HOLLAND), 2005, vol. 244, 1-4, p. 431-434. ISSN 0169-4332.
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Basic information
Original name Optical properties of slightly rough LaNiO3 thin films studied by spectroscopic ellipsometry and reflectometry
Name in Czech Optické vlastnosti jemně drsných tenkých vrstev LaNiO3 studovaných spektroskopickou elipsometrií a reflektometrií
Authors MISTRÍK, Jan (203 Czech Republic), Tomuo YAMAGUCHI (392 Japan), Daniel FRANTA (203 Czech Republic, guarantor), Ivan OHLÍDAL (203 Czech Republic), Gu Jin HU (156 China) and Ning DAI (156 China).
Edition Applied Surface Science, USA, ELSEVIER (NORTH-HOLLAND), 2005, 0169-4332.
Other information
Original language English
Type of outcome Article in a journal
Field of Study 10302 Condensed matter physics
Country of publisher United States of America
Confidentiality degree is not subject to a state or trade secret
WWW URL
Impact factor Impact factor: 1.263
RIV identification code RIV/00216224:14310/05:00014774
Organization unit Faculty of Science
UT WoS 000228600200099
Keywords in English Ellipsometry; Reflectometry; Optical constants; LNO; LaNiO3
Tags ellipsometry, LaNiO3, LNO, optical constants, Reflectometry
Changed by Changed by: Mgr. Daniel Franta, Ph.D., učo 2000. Changed: 3/2/2006 17:48.
Abstract
Optical characterization of sol-gel deposited lanthanum nickel oxide, LaNiO3 (LNO) film on Pt-coated Si substrate was performed by spectroscopic ellipsometry and reflectometry. The sum of five Lorentz oscillators was used for LNO dispersion parameterization in spectral range from 190 to 1000 nm. Two theoretical approaches: Raileigh-Rice theory (RRT) and effective medium approximation (EMA) were considered to account for the effect of LNO upper boundary roughness. Root mean square (rms) values of the heights of irregularities obtained by atomic force microscopy (AFM) and RRT were 2.09 and 5.62 nm, respectively. Effective layer thickness in EMA approach was found to be 4.62 nm. Higher values of roughness determined from optical methods with respect to the AFM may be assigned to the effect of convolution of AFM tip and boundary irregularities.
Abstract (in Czech)
Optická charakterizace vrstev LaNiO3 (LNO) deponovaných sol-gel metodou na podložky Si pokryté Pt byla provedena pomocí spektroskopické elipsometrie a reflektometrie. Součet pěti Lorentzových oscilátorů byl užit pro dispersní parametrizaci LNO ve spektrálním oboru 190-1000 nm. Dva teoretic képřístupy: Rayleigh-Riceova teorie (RRT) a aproximace efektivního prostředí (EMA) byly uvažovány při započtení vlivu drsnosti rozhraní. RMS hodnoty výšek nepravidelností obdržené pomocí mikroskopie atomové síly (AFM) a RRT byly 2.09 a 5.62 nm. Tloušťka efektivní vrstvy v rámci přístupu EMA byla zjištěna v hodnotě 4.62 nm. Vyšší hodnoty drsnosti určené pomocí optické metody vzhledem k AFM mohou být vysvětleny efektem konvoluce hrotu AFM a nepravidelností rozhraní.
Links
MSM 143100003, plan (intention)Name: Studium plazmochemických reakcí v neizotermickém nízkoteplotním plazmatu a jeho interakcí s povrchem pevných látek
Investor: Ministry of Education, Youth and Sports of the CR, Study of plasmachemical reactions in non-isothermic low pressure plasma and its interaction with the surface of solid substrates
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