BURŠÍKOVÁ, Vilma, Petr SLÁDEK and Pavel SŤAHEL. Mechanical properties of amorphous and nanocrystalline silicon thin films on flexible substrates. In NENAMAT International Conference Proceedings NANO05. 1st ed. Brno: Brno University of Technology, Faculty of Mechanical Engineering, 2005, p. 396-399. ISBN 80-214-3085-0. |
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@inproceedings{622624, author = {Buršíková, Vilma and Sládek, Petr and Sťahel, Pavel}, address = {Brno}, booktitle = {NENAMAT International Conference Proceedings NANO05}, edition = {1.}, keywords = {Mechanical properties; Amorphous silicon; Nanocrystalline Silicon}, language = {eng}, location = {Brno}, isbn = {80-214-3085-0}, pages = {396-399}, publisher = {Brno University of Technology, Faculty of Mechanical Engineering}, title = {Mechanical properties of amorphous and nanocrystalline silicon thin films on flexible substrates}, year = {2005} }
TY - JOUR ID - 622624 AU - Buršíková, Vilma - Sládek, Petr - Sťahel, Pavel PY - 2005 TI - Mechanical properties of amorphous and nanocrystalline silicon thin films on flexible substrates PB - Brno University of Technology, Faculty of Mechanical Engineering CY - Brno SN - 8021430850 KW - Mechanical properties KW - Amorphous silicon KW - Nanocrystalline Silicon N2 - The objective of our study was to investigate the mechanical properties of amorphous and nanocrystalline silicon thin layer deposited on flexible sustrates by means of depth sensing intendation method. ER -
BURŠÍKOVÁ, Vilma, Petr SLÁDEK and Pavel SŤAHEL. Mechanical properties of amorphous and nanocrystalline silicon thin films on flexible substrates. In \textit{NENAMAT International Conference Proceedings NANO05}. 1st ed. Brno: Brno University of Technology, Faculty of Mechanical Engineering, 2005, p.~396-399. ISBN~80-214-3085-0.
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