| JAN, Mistrík, Ivan OHLÍDAL, Roman ANTOŠ, Mitsuru AOYAMA and Tomuo YAMAGUCHI. Evidence of refractive index change in glass substrates induced by high-density reactive ion plating deposition of SiO2 films. Applied Surface Science. USA: ELSEVIER (NORTH-HOLLAND), 2005, vol. 244, 1-4, p. 51-54. ISSN 0169-4332. |
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@article{630338,
author = {Jan, Mistrík and Ohlídal, Ivan and Antoš, Roman and Aoyama, Mitsuru and Yamaguchi, Tomuo},
article_location = {USA},
article_number = {1-4},
keywords = {ellipsometry; reflectometry; ion plating; SiO2/glass interface; change of refractive index; plasma-assisted deposition; Schott B270},
language = {eng},
issn = {0169-4332},
journal = {Applied Surface Science},
title = {Evidence of refractive index change in glass substrates induced by high-density reactive ion plating deposition of SiO2 films},
volume = {244},
year = {2005}
}
TY - JOUR
ID - 630338
AU - Jan, Mistrík - Ohlídal, Ivan - Antoš, Roman - Aoyama, Mitsuru - Yamaguchi, Tomuo
PY - 2005
TI - Evidence of refractive index change in glass substrates induced by high-density reactive ion plating deposition of SiO2 films
JF - Applied Surface Science
VL - 244
IS - 1-4
SP - 51-54
EP - 51-54
PB - ELSEVIER (NORTH-HOLLAND)
SN - 01694332
KW - ellipsometry
KW - reflectometry
KW - ion plating
KW - SiO2/glass interface
KW - change of refractive index
KW - plasma-assisted deposition
KW - Schott B270
N2 - High-density reactive ion plating was used for SiO2 coating of Schott B270 glass. Optical properties of the sample were intensively studied by spectroscopic ellipsometry, reflectance and transmittance. Several optical models accounting for different structural defects, i.e., (1) gradient profile of refractive index in SiO2 layer, (2) transition layer between SiO2 and glass, and (3) induced slow variation of glass refractive index close to SiO2/glass interface were considered. The last one with increased value of substrate refractive index gave the best correspondence with the experimental data. (c) 2004 Elsevier B.V. All rights reserved.
ER -
JAN, Mistrík, Ivan OHLÍDAL, Roman ANTOŠ, Mitsuru AOYAMA and Tomuo YAMAGUCHI. Evidence of refractive index change in glass substrates induced by high-density reactive ion plating deposition of SiO2 films. \textit{Applied Surface Science}. USA: ELSEVIER (NORTH-HOLLAND), 2005, vol.~244, 1-4, p.~51-54. ISSN~0169-4332.
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