ANTOŠ, Roman, Ivan OHLÍDAL, Jan MISTRÍK, K. MURAKAMI, Tomuo YAMAGUCHI, J. PIŠTORA, M. HORIE and Štefan VIŠŇOVSKÝ. Spectroscopic ellipsometry on lamellar gratings. Applied Surface Science. USA: ELSEVIER (NORTH-HOLLAND), 2005, vol. 244, 1-4, p. 225-229. ISSN 0169-4332. |
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@article{630341, author = {Antoš, Roman and Ohlídal, Ivan and Mistrík, Jan and Murakami, K. and Yamaguchi, Tomuo and Pištora, J. and Horie, M. and Višňovský, Štefan}, article_location = {USA}, article_number = {1-4}, keywords = {optical metrology; scatterometry; spectroscopic ellipsometry; diffraction grating; wood anomaly; RCWA}, language = {eng}, issn = {0169-4332}, journal = {Applied Surface Science}, title = {Spectroscopic ellipsometry on lamellar gratings}, volume = {244}, year = {2005} }
TY - JOUR ID - 630341 AU - Antoš, Roman - Ohlídal, Ivan - Mistrík, Jan - Murakami, K. - Yamaguchi, Tomuo - Pištora, J. - Horie, M. - Višňovský, Štefan PY - 2005 TI - Spectroscopic ellipsometry on lamellar gratings JF - Applied Surface Science VL - 244 IS - 1-4 SP - 225-229 EP - 225-229 PB - ELSEVIER (NORTH-HOLLAND) SN - 01694332 KW - optical metrology KW - scatterometry KW - spectroscopic ellipsometry KW - diffraction grating KW - wood anomaly KW - RCWA N2 - Deep lamellar diffraction gratings fabricated by etching a transparent quartz plate are studied using spectroscopic ellipsometry. The rigorous coupled-wave analysis is used to calculate the optical response of the gratings. Three parameters of the rectangular profile are determined by utilizing the least-square method. Detailed investigation of the spectral dependences demonstrates the uniqueness of the solution. Observing the spectral dependences of Wood anomalies suggests that even complicated profiles can be fitted with high authenticity. ER -
ANTOŠ, Roman, Ivan OHLÍDAL, Jan MISTRÍK, K. MURAKAMI, Tomuo YAMAGUCHI, J. PIŠTORA, M. HORIE and Štefan VIŠŇOVSKÝ. Spectroscopic ellipsometry on lamellar gratings. \textit{Applied Surface Science}. USA: ELSEVIER (NORTH-HOLLAND), 2005, vol.~244, 1-4, p.~225-229. ISSN~0169-4332.
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