| KLAPETEK, Petr, Ivan OHLÍDAL and Jiří BURŠÍK. Scanning thermal microscopy - theory and applications. Jemná mechanika a optika. Přerov: Physical Institute, ASCR, 2005, vol. 50, 11-12, p. 327-329. ISSN 0447-6441. |
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@article{630344,
author = {Klapetek, Petr and Ohlídal, Ivan and Buršík, Jiří},
article_location = {Přerov},
article_number = {11-12},
keywords = {Scanning thermal microscopy},
language = {eng},
issn = {0447-6441},
journal = {Jemná mechanika a optika},
title = {Scanning thermal microscopy - theory and applications},
volume = {50},
year = {2005}
}
TY - JOUR
ID - 630344
AU - Klapetek, Petr - Ohlídal, Ivan - Buršík, Jiří
PY - 2005
TI - Scanning thermal microscopy - theory and applications
JF - Jemná mechanika a optika
VL - 50
IS - 11-12
SP - 327-329
EP - 327-329
PB - Physical Institute, ASCR
SN - 04476441
KW - Scanning thermal microscopy
N2 - In this article the theoretical background and some results of the scanning thermal microscopy analysis of artifical structures such as microchip surfaces and solar cell contacts are presented. It is shown that at the absence of surface roughness the SThM can be used to obtain reliable material contrast images. However, roughness and other topographical features can influence the thermal data in a strong way. It is illustrated that this effect can be partially removed by using neural network approach for modelling the thermal signal using the topography data. The illustration of this approach is presented in the analysis of geometry of the examples selected in this article.
ER -
KLAPETEK, Petr, Ivan OHLÍDAL and Jiří BURŠÍK. Scanning thermal microscopy - theory and applications. \textit{Jemná mechanika a optika}. Přerov: Physical Institute, ASCR, 2005, vol.~50, 11-12, p.~327-329. ISSN~0447-6441.
|
