KLAPETEK, Petr, Ivan OHLÍDAL and Jiří BURŠÍK. Scanning thermal microscopy - theory and applications. Jemná mechanika a optika. Přerov: Physical Institute, ASCR, 2005, vol. 50, 11-12, p. 327-329. ISSN 0447-6441. |
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@article{630344, author = {Klapetek, Petr and Ohlídal, Ivan and Buršík, Jiří}, article_location = {Přerov}, article_number = {11-12}, keywords = {Scanning thermal microscopy}, language = {eng}, issn = {0447-6441}, journal = {Jemná mechanika a optika}, title = {Scanning thermal microscopy - theory and applications}, volume = {50}, year = {2005} }
TY - JOUR ID - 630344 AU - Klapetek, Petr - Ohlídal, Ivan - Buršík, Jiří PY - 2005 TI - Scanning thermal microscopy - theory and applications JF - Jemná mechanika a optika VL - 50 IS - 11-12 SP - 327-329 EP - 327-329 PB - Physical Institute, ASCR SN - 04476441 KW - Scanning thermal microscopy N2 - In this article the theoretical background and some results of the scanning thermal microscopy analysis of artifical structures such as microchip surfaces and solar cell contacts are presented. It is shown that at the absence of surface roughness the SThM can be used to obtain reliable material contrast images. However, roughness and other topographical features can influence the thermal data in a strong way. It is illustrated that this effect can be partially removed by using neural network approach for modelling the thermal signal using the topography data. The illustration of this approach is presented in the analysis of geometry of the examples selected in this article. ER -
KLAPETEK, Petr, Ivan OHLÍDAL and Jiří BURŠÍK. Scanning thermal microscopy - theory and applications. \textit{Jemná mechanika a optika}. Přerov: Physical Institute, ASCR, 2005, vol.~50, 11-12, p.~327-329. ISSN~0447-6441.
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