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@inproceedings{630443,
author = {Ohlídal, Miloslav and Šír, L. and Jákl, M. and Ohlídal, Ivan},
address = {Bellingham, Washington, USA},
booktitle = {Proceedings of SPIE 5945, 14th Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics},
keywords = {Holography; Interference; Surface roughness; Metrology},
language = {eng},
location = {Bellingham, Washington, USA},
isbn = {0-8194-5958-8},
pages = {59450I-1-59450I-8},
publisher = {SPIE - The International Society for Optical Engineering},
title = {Digital two-wavelength holographic interference microscopy for surface roughness measurement},
year = {2005}
}
TY - JOUR
ID - 630443
AU - Ohlídal, Miloslav - Šír, L. - Jákl, M. - Ohlídal, Ivan
PY - 2005
TI - Digital two-wavelength holographic interference microscopy for surface roughness measurement
PB - SPIE - The International Society for Optical Engineering
CY - Bellingham, Washington, USA
SN - 0819459588
KW - Holography
KW - Interference
KW - Surface roughness
KW - Metrology
N2 - A new approach to surface roughness measurement based on the digital two-wavelength holographic interference microscopy with the synthetic wavelength is presented. Two holograms of a rough surface are recorded step by step at two wavelengths of laser light by means of a CCD camera. Both holograms are numerically superposed and then reconstructed. Two reconstructed digital waves obtained numerically interfere. The surface roughness parameters can be determined from the shape of interference fringes in that interferogram created. The range of measurable height irregularities of the surface is given by the synthetic wavelength, which is indirectly proportional to the difference of the selected wavelengths.
ER -
OHLÍDAL, Miloslav, L. ŠÍR, M. JÁKL a Ivan OHLÍDAL. Digital two-wavelength holographic interference microscopy for surface roughness measurement. In \textit{Proceedings of SPIE 5945, 14th Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics}. Bellingham, Washington, USA: SPIE - The International Society for Optical Engineering. s.~59450I-1-59450I-8, 8 s. ISBN~0-8194-5958-8. 2005.
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