| VALTR, Miroslav, Ivan OHLÍDAL and Daniel FRANTA. Optical characterization of carbon films prepared by PECVD using ellipsometry and reflectometry. Czech. J. Phys. Praha: Institute of Physics Academy of Sciences, 2006, 56/2006, Suppl. B, p. 1103 - 1109. ISSN 0011-4626. |
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@article{694025,
author = {Valtr, Miroslav and Ohlídal, Ivan and Franta, Daniel},
article_location = {Praha},
article_number = {Suppl. B},
keywords = {plasma discharge; PECVD; ellipsometry; reflectometry; plasma},
language = {eng},
issn = {0011-4626},
journal = {Czech. J. Phys.},
title = {Optical characterization of carbon films prepared by PECVD using ellipsometry and reflectometry},
volume = {56/2006},
year = {2006}
}
TY - JOUR
ID - 694025
AU - Valtr, Miroslav - Ohlídal, Ivan - Franta, Daniel
PY - 2006
TI - Optical characterization of carbon films prepared by PECVD using ellipsometry and reflectometry
JF - Czech. J. Phys.
VL - 56/2006
IS - Suppl. B
SP - 1103 - 1109
EP - 1103 - 1109
PB - Institute of Physics Academy of Sciences
SN - 00114626
KW - plasma discharge
KW - PECVD
KW - ellipsometry
KW - reflectometry
KW - plasma
N2 - Carbon polymer-like films were prepared using plasma enhanced chemical vapor deposition in pulsed regime in Ar-acetylene gas mixture. The optical characterization of these films was performed by variable angle spectroscopic ellipsometry and spectroscopic reflectometry. Within the characterization the thicknesses, spectral dependences of the refractive index and extinction coefficient, dispersion parameters and the root-mean-square values of the heights of boundary roughness were determined. Non-negligible differences between the dependences of the film thickness on the deposition time determined using the ellipsometric data on the one hand and reflectometric data on the other hand were observed. These differences were explained by the fact that the films exhibited other defects that were not included in their structural model. Sensitivity of the optical parameters of the films on UV irradiation was also observed.
ER -
VALTR, Miroslav, Ivan OHLÍDAL and Daniel FRANTA. Optical characterization of carbon films prepared by PECVD using ellipsometry and reflectometry. \textit{Czech. J. Phys.}. Praha: Institute of Physics Academy of Sciences, 2006, 56/2006, Suppl. B, p.~1103 - 1109. ISSN~0011-4626.
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