ŠMÍD, Radek, Agnès GRANIER, Angelique BOUSQUET, Cartry GILLES and Lenka ZAJÍČKOVÁ. Study of magnetic field influence on charged species in a low pressure helicon reactor. Czechoslovak Journal of Physics. Praha: Institute of Physics Academy of Sciences, 2006, vol. 56, suppl. B, p. 1091-1096. ISSN 0011-4626. |
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@article{695206, author = {Šmíd, Radek and Granier, Agnès and Bousquet, Angelique and Gilles, Cartry and Zajíčková, Lenka}, article_location = {Praha}, article_number = {suppl. B}, keywords = {helicon reactor; argon; oxygen; electron density; ion flux}, language = {eng}, issn = {0011-4626}, journal = {Czechoslovak Journal of Physics}, title = {Study of magnetic field influence on charged species in a low pressure helicon reactor}, volume = {56}, year = {2006} }
TY - JOUR ID - 695206 AU - Šmíd, Radek - Granier, Agnès - Bousquet, Angelique - Gilles, Cartry - Zajíčková, Lenka PY - 2006 TI - Study of magnetic field influence on charged species in a low pressure helicon reactor JF - Czechoslovak Journal of Physics VL - 56 IS - suppl. B SP - 1091-1096 EP - 1091-1096 PB - Institute of Physics Academy of Sciences SN - 00114626 KW - helicon reactor KW - argon KW - oxygen KW - electron density KW - ion flux N2 - The variation of electron density, ion flux and emission of argon lines were investigated in a rf helicon reactor for different static magnetic field amplitude and rf power using Langmuir probe, rf coupled planar probe and optical emission spectroscopy. The static magnetic field was created by two Helmholtz coils positioned around the plasma source. Its amplitude B varied by changing the current 0-2 A through the coils from 0 to 10 mT in the helicon source, which corresponded to 0-1.4 mT in the diffusion chamber. We studied Ar and O2 discharges at 0.7 Pa with rf power 50-600 W applied to the helicon antenna. The variations of electron density, ion flux and intensity of Ar 750 nm with the rf power measured in Ar diffusion plasma were in a good agreement. Measurements in oxygen discharge showed slightly different results. ER -
ŠMÍD, Radek, Agnès GRANIER, Angelique BOUSQUET, Cartry GILLES and Lenka ZAJÍČKOVÁ. Study of magnetic field influence on charged species in a low pressure helicon reactor. \textit{Czechoslovak Journal of Physics}. Praha: Institute of Physics Academy of Sciences, 2006, vol.~56, suppl. B, p.~1091-1096. ISSN~0011-4626.
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