| ŠMÍD, Radek, Agnès GRANIER, Angelique BOUSQUET, Cartry GILLES and Lenka ZAJÍČKOVÁ. Study of magnetic field influence on charged species in a low pressure helicon reactor. Czechoslovak Journal of Physics. Praha: Institute of Physics Academy of Sciences, 2006, vol. 56, suppl. B, p. 1091-1096. ISSN 0011-4626. |
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@article{695206,
author = {Šmíd, Radek and Granier, Agnès and Bousquet, Angelique and Gilles, Cartry and Zajíčková, Lenka},
article_location = {Praha},
article_number = {suppl. B},
keywords = {helicon reactor; argon; oxygen; electron density; ion flux},
language = {eng},
issn = {0011-4626},
journal = {Czechoslovak Journal of Physics},
title = {Study of magnetic field influence on charged species in a low pressure helicon reactor},
volume = {56},
year = {2006}
}
TY - JOUR
ID - 695206
AU - Šmíd, Radek - Granier, Agnès - Bousquet, Angelique - Gilles, Cartry - Zajíčková, Lenka
PY - 2006
TI - Study of magnetic field influence on charged species in a low pressure helicon reactor
JF - Czechoslovak Journal of Physics
VL - 56
IS - suppl. B
SP - 1091-1096
EP - 1091-1096
PB - Institute of Physics Academy of Sciences
SN - 00114626
KW - helicon reactor
KW - argon
KW - oxygen
KW - electron density
KW - ion flux
N2 - The variation of electron density, ion flux and emission of argon lines were investigated in a rf helicon reactor for different static magnetic field amplitude and rf power using Langmuir probe, rf coupled planar probe and optical emission spectroscopy. The static magnetic field was created by two Helmholtz coils positioned around the plasma source. Its amplitude B varied by changing the current 0-2 A through the coils from 0 to 10 mT in the helicon source, which corresponded to 0-1.4 mT in the diffusion chamber. We studied Ar and O2 discharges at 0.7 Pa with rf power 50-600 W applied to the helicon antenna. The variations of electron density, ion flux and intensity of Ar 750 nm with the rf power measured in Ar diffusion plasma were in a good agreement. Measurements in oxygen discharge showed slightly different results.
ER -
ŠMÍD, Radek, Agnès GRANIER, Angelique BOUSQUET, Cartry GILLES and Lenka ZAJÍČKOVÁ. Study of magnetic field influence on charged species in a low pressure helicon reactor. \textit{Czechoslovak Journal of Physics}. Praha: Institute of Physics Academy of Sciences, 2006, vol.~56, suppl. B, p.~1091-1096. ISSN~0011-4626.
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