LÜBBERT, D., Petr MIKULÍK, P. PERNOT, L. HELFEN, M.D. CRAVEN, S. KELLER, S. DENBAARS and T. BAUMBACH. X-ray microdiffraction imaging investigations of wing tilt in epitaxially overgrown GaN. Physica stat.sol.(a). 2006, vol. 203, No 7, p. 1733-1738. ISSN 0031-8965. |
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@article{698743, author = {Lübbert, D. and Mikulík, Petr and Pernot, P. and Helfen, L. and Craven, M.D. and Keller, S. and DenBaars, S. and Baumbach, T.}, article_number = {7}, keywords = {lattice tilt; diffraction; X-ray diffraction; GaN; ELO}, language = {eng}, issn = {0031-8965}, journal = {Physica stat.sol.(a)}, title = {X-ray microdiffraction imaging investigations of wing tilt in epitaxially overgrown GaN}, url = {http://www.sci.muni.cz/~mikulik/Publications.html#LubbertMikulikPernot-pssa-2006}, volume = {203}, year = {2006} }
TY - JOUR ID - 698743 AU - Lübbert, D. - Mikulík, Petr - Pernot, P. - Helfen, L. - Craven, M.D. - Keller, S. - DenBaars, S. - Baumbach, T. PY - 2006 TI - X-ray microdiffraction imaging investigations of wing tilt in epitaxially overgrown GaN JF - Physica stat.sol.(a) VL - 203 IS - 7 SP - 1733-1738 EP - 1733-1738 SN - 00318965 KW - lattice tilt KW - diffraction KW - X-ray diffraction KW - GaN KW - ELO UR - http://www.sci.muni.cz/~mikulik/Publications.html#LubbertMikulikPernot-pssa-2006 N2 - The crystalline quality in epitaxially laterally overgrown (ELO) GaN and the amount of wing tilt is characterized on a local basis, with high spatial and angular resolution. A method of full-field X-ray microdiffraction imaging, termed rocking curve imaging, is used to record simultaneously a large set of local X-ray diffraction profiles originating from sample surface areas of micrometer size. x-omega maps of diffracted intensity allow to quantify the amount of wing tilt in individual lateral ELO periods as well as to monitor the fluctuations of tilt between adjacent periods. Automated shape analysis of the full set of local rocking curves provides a means to quantitatively characterize the local crystalline perfection of GaN. The ELO window and wing regions can be clearly separated; comparison indicates an average improvement of crystal quality by a factor 3–4 due to the lateral overgrowth process. ER -
LÜBBERT, D., Petr MIKULÍK, P. PERNOT, L. HELFEN, M.D. CRAVEN, S. KELLER, S. DENBAARS and T. BAUMBACH. X-ray microdiffraction imaging investigations of wing tilt in epitaxially overgrown GaN. \textit{Physica stat.sol.(a)}. 2006, vol.~203, No~7, p.~1733-1738. ISSN~0031-8965.
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