| BURŠÍKOVÁ, Vilma, Zdeněk FRGALA, Jiří BURŠÍK, Ondřej JAŠEK, Lenka ZAJÍČKOVÁ, Monika KARÁSKOVÁ, Jiřina MATĚJKOVÁ, Antonín REK, Daniel FRANTA and Petr KLAPETEK. Mechanical properties of nanostructured composite diamond films prepared by PECVD enhanced by RF induced DC self bias. In E-MRS 2006 Fall meeting. 1st ed. Warsaw: EMRS, 2006, p. 14-14. ISBN 83-89-585-09-X. |
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@inproceedings{699195,
author = {Buršíková, Vilma and Frgala, Zdeněk and Buršík, Jiří and Jašek, Ondřej and Zajíčková, Lenka and Karásková, Monika and Matějková, Jiřina and Rek, Antonín and Franta, Daniel and Klapetek, Petr},
address = {Warsaw},
booktitle = {E-MRS 2006 Fall meeting},
edition = {1},
keywords = {nanostructures; composites; diamond films; PECVD; RF induced DC self bias voltage},
language = {eng},
location = {Warsaw},
isbn = {83-89-585-09-X},
pages = {14-14},
publisher = {EMRS},
title = {Mechanical properties of nanostructured composite diamond films prepared by PECVD enhanced by RF induced DC self bias},
year = {2006}
}
TY - JOUR
ID - 699195
AU - Buršíková, Vilma - Frgala, Zdeněk - Buršík, Jiří - Jašek, Ondřej - Zajíčková, Lenka - Karásková, Monika - Matějková, Jiřina - Rek, Antonín - Franta, Daniel - Klapetek, Petr
PY - 2006
TI - Mechanical properties of nanostructured composite diamond films prepared by PECVD enhanced by RF induced DC self bias
PB - EMRS
CY - Warsaw
SN - 838958509X
KW - nanostructures
KW - composites
KW - diamond films
KW - PECVD
KW - RF induced DC self bias voltage
N2 - Mechanical properties of nanostructured composite diamond films prepatred by PECVD enhanced by RF induced DC self bias
ER -
BURŠÍKOVÁ, Vilma, Zdeněk FRGALA, Jiří BURŠÍK, Ondřej JAŠEK, Lenka ZAJÍČKOVÁ, Monika KARÁSKOVÁ, Jiřina MATĚJKOVÁ, Antonín REK, Daniel FRANTA and Petr KLAPETEK. Mechanical properties of nanostructured composite diamond films prepared by PECVD enhanced by RF induced DC self bias. In \textit{E-MRS 2006 Fall meeting}. 1st ed. Warsaw: EMRS, 2006, p.~14-14. ISBN~83-89-585-09-X.
|
