| BURŠÍKOVÁ, Vilma, Lenka ZAJÍČKOVÁ, Pavel DVOŘÁK, Miroslav VALTR, Jiří BURŠÍK, Olga BLÁHOVÁ, Vratislav PEŘINA and Jan JANČA. Influence of Silicon, Oxygen and Nitrogen Upon the Properties of Plasma Deposited Amorphous Diamond-like Carbon Coatings. Journal of advanced oxidation technologies. Dundas, Ontario, Canada: Science & Technology Network, Inc., 2006, vol. 9, No 2, p. 232-237, 5 pp. ISSN 1203-8407. |
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@article{699203,
author = {Buršíková, Vilma and Zajíčková, Lenka and Dvořák, Pavel and Valtr, Miroslav and Buršík, Jiří and Bláhová, Olga and Peřina, Vratislav and Janča, Jan},
article_location = {Dundas, Ontario, Canada},
article_number = {2},
keywords = {Silicon; Oxygen; Nitrogen; Admixtures; PECVD; Amorphous Diamond-like Carbon Coatings},
language = {eng},
issn = {1203-8407},
journal = {Journal of advanced oxidation technologies},
title = {Influence of Silicon, Oxygen and Nitrogen Upon the Properties of Plasma Deposited Amorphous Diamond-like Carbon Coatings},
volume = {9},
year = {2006}
}
TY - JOUR
ID - 699203
AU - Buršíková, Vilma - Zajíčková, Lenka - Dvořák, Pavel - Valtr, Miroslav - Buršík, Jiří - Bláhová, Olga - Peřina, Vratislav - Janča, Jan
PY - 2006
TI - Influence of Silicon, Oxygen and Nitrogen Upon the Properties of Plasma Deposited Amorphous Diamond-like Carbon Coatings
JF - Journal of advanced oxidation technologies
VL - 9
IS - 2
SP - 232-237
EP - 232-237
PB - Science & Technology Network, Inc.
SN - 12038407
KW - Silicon
KW - Oxygen
KW - Nitrogen
KW - Admixtures
KW - PECVD
KW - Amorphous Diamond-like Carbon Coatings
N2 - Amorphous diamond-like carbon films (DLC) with various silicon, oxygen and nitrogen content were deposited by plasma enhanced chemical vapor deposition (PECVD) technique. The films were prepared from the mixture of methane and hexamethyldisiloxane (HMDSO) in r.f. capacitively coupled discharges (13.56 MHz). The reactive plasma was investigated by optical emission spectroscopy and capacitive coupled planar probe. A combination of RBS, ERDA, FTIR and XPS methods was used to study the films' chemical composition and structure. The mechanical properties were studied using a depth sensing indentation technique. The films were mainly composed of C-C, C-H and C-Si bonds. The optimum deposition conditions for the preparation of DLC films, with enhanced thermo-mechanical stability, were determined.
ER -
BURŠÍKOVÁ, Vilma, Lenka ZAJÍČKOVÁ, Pavel DVOŘÁK, Miroslav VALTR, Jiří BURŠÍK, Olga BLÁHOVÁ, Vratislav PEŘINA and Jan JANČA. Influence of Silicon, Oxygen and Nitrogen Upon the Properties of Plasma Deposited Amorphous Diamond-like Carbon Coatings. \textit{Journal of advanced oxidation technologies}. Dundas, Ontario, Canada: Science \&{} Technology Network, Inc., 2006, vol.~9, No~2, p.~232-237, 5 pp. ISSN~1203-8407.
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