| BURŠÍKOVÁ, Vilma, Petr SLÁDEK, Pavel SŤAHEL and Jiří BURŠÍK. Mechanical properties of thin silicon films deposited on glass and plastic substrates studied by depth sensing indentation technique. Journal of Non-Crystalline Solids. Nizozemsko: Elsevier Science B.V., 2006, vol. 352, 9-20, p. 1242-1245. ISSN 0022-3093. |
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@article{699212,
author = {Buršíková, Vilma and Sládek, Petr and Sťahel, Pavel and Buršík, Jiří},
article_location = {Nizozemsko},
article_number = {9-20},
keywords = {amorphous semiconductors; silicon; mechanical properties; creep; hardness; intendation; microintendation;ELASTIC-MODULUS; COATED SYSTEMS},
language = {eng},
issn = {0022-3093},
journal = {Journal of Non-Crystalline Solids},
title = {Mechanical properties of thin silicon films deposited on glass and plastic substrates studied by depth sensing indentation technique},
volume = {352},
year = {2006}
}
TY - JOUR
ID - 699212
AU - Buršíková, Vilma - Sládek, Petr - Sťahel, Pavel - Buršík, Jiří
PY - 2006
TI - Mechanical properties of thin silicon films deposited on glass and plastic substrates studied by depth sensing indentation technique
JF - Journal of Non-Crystalline Solids
VL - 352
IS - 9-20
SP - 1242-1245
EP - 1242-1245
PB - Elsevier Science B.V.
SN - 00223093
KW - amorphous semiconductors
KW - silicon
KW - mechanical properties
KW - creep
KW - hardness
KW - intendation
KW - microintendation;ELASTIC-MODULUS
KW - COATED SYSTEMS
N2 - This work concerns the characterisation of mechanical properties of thin amorphous and microcrystalline silicon films deposited on glass and polyethylene terephthalate substrates. The film/substrate indentation response has been investigated from the near surface up to film/substrate interface using depth sensing indentation technique. The universal hardness, Vickers hardness, elastic modulus, fracture toughness and creep resistance of the studied films have been determined. Particular attention has been paid to the effects of the flexible viscoelastic-plastic substrate on the indentation response of the film/substrate system. (c) 2006 Elsevier B.V. All rights reserved.
ER -
BURŠÍKOVÁ, Vilma, Petr SLÁDEK, Pavel SŤAHEL and Jiří BURŠÍK. Mechanical properties of thin silicon films deposited on glass and plastic substrates studied by depth sensing indentation technique. \textit{Journal of Non-Crystalline Solids}. Nizozemsko: Elsevier Science B.V., 2006, vol.~352, 9-20, p.~1242-1245. ISSN~0022-3093.
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