Mechanical properties of thin silicon films deposited on glass and plastic substrates studied by depth sensing indentation technique

BURŠÍKOVÁ, Vilma, Petr SLÁDEK, Pavel SŤAHEL and Jiří BURŠÍK. Mechanical properties of thin silicon films deposited on glass and plastic substrates studied by depth sensing indentation technique. Journal of Non-Crystalline Solids. Nizozemsko: Elsevier Science B.V., 2006, vol. 352, 9-20, p. 1242-1245. ISSN 0022-3093.

Basic information

Original name

Mechanical properties of thin silicon films deposited on glass and plastic substrates studied by depth sensing indentation technique

Name in Czech

Studium mechanických vlastností tenkých křemíkových vrstev deponovaných na skleněné a plastové podložky instrumentovanou indentační technikou

Authors

BURŠÍKOVÁ, Vilma (203 Czech Republic, guarantor, belonging to the institution), Petr SLÁDEK (203 Czech Republic, belonging to the institution), Pavel SŤAHEL (203 Czech Republic, belonging to the institution) and Jiří BURŠÍK (203 Czech Republic)

Edition

Journal of Non-Crystalline Solids, Nizozemsko, Elsevier Science B.V. 2006, 0022-3093

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Other information

Language

English

Type of outcome

Článek v odborném periodiku

Field of Study

10302 Condensed matter physics

Country of publisher

Netherlands

Confidentiality degree

není předmětem státního či obchodního tajemství

Impact factor

Impact factor: 1.362

RIV identification code

RIV/00216224:14310/06:00015920

Organization unit

Faculty of Science

UT WoS

000238782900092

Keywords in English

amorphous semiconductors; silicon; mechanical properties; creep; hardness; intendation; microintendation;ELASTIC-MODULUS; COATED SYSTEMS

Tags

amorphous semiconductors, COATED SYSTEMS, Creep, ELASTIC-MODULUS, hardness, intendation, mechanical properties, microintendation, Silicon

Tags

International impact, Reviewed

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Abstract

V originále

This work concerns the characterisation of mechanical properties of thin amorphous and microcrystalline silicon films deposited on glass and polyethylene terephthalate substrates. The film/substrate indentation response has been investigated from the near surface up to film/substrate interface using depth sensing indentation technique. The universal hardness, Vickers hardness, elastic modulus, fracture toughness and creep resistance of the studied films have been determined. Particular attention has been paid to the effects of the flexible viscoelastic-plastic substrate on the indentation response of the film/substrate system. (c) 2006 Elsevier B.V. All rights reserved.

In Czech

Studium mechanických vlastností tenkých křemíkových vrstev deponovaných na skleněné a plastové podložky instrumentovanou indentační technikou

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Links

GA106/05/0274, research and development project	Name: Víceúrovňové studium vztahů mezi mechanickými a mikrostrukturními charakteristikami materiálů Investor: Czech Science Foundation, Multiscale approach to relationships between mechanical and microstructural characteristics of materials
GA202/05/0777, research and development project	Name: Plazmochemická modifikace přírodních polymerů na bázi celulózy v povrchovém nebo koplanárním bariérovém výboji za atmosférického tlaku Investor: Czech Science Foundation, Plasmachemical modification of natural polymers based on cellulose in atmospheric pressure surface or coplanar barrier discharge