Deposition and Characterisation of Nanostructured silicon-oxide Containing Diamond-like Carbon Coatings

BURŠÍKOVÁ, Vilma, Lenka ZAJÍČKOVÁ, Daniel FRANTA, Jan JANČA, Jiří BURŠÍK, Petr KLAPETEK, Olga BLÁHOVÁ, Vratislav PEŘINA and Vladislav NAVRÁTIL. Deposition and Characterisation of Nanostructured silicon-oxide Containing Diamond-like Carbon Coatings. In 7th International Balkan Workshop on Applied Physics - Abstracts. 1st ed. Constanta, Romania: Ovidius University, 2006, p. 101-102, 1 pp. ISBN 978-80-214-3460-8.

Basic information

Original name

Deposition and Characterisation of Nanostructured silicon-oxide Containing Diamond-like Carbon Coatings

Name in Czech

Depozice a charakterizace nanostrukturovaných SiO modifikovaných diamantu-podobných uhlíkových vrstev

Authors

BURŠÍKOVÁ, Vilma (203 Czech Republic, guarantor), Lenka ZAJÍČKOVÁ (203 Czech Republic), Daniel FRANTA (203 Czech Republic), Jan JANČA (203 Czech Republic), Jiří BURŠÍK (203 Czech Republic), Petr KLAPETEK (203 Czech Republic), Olga BLÁHOVÁ (203 Czech Republic), Vratislav PEŘINA (203 Czech Republic) and Vladislav NAVRÁTIL (203 Czech Republic)

Edition

1. vyd. Constanta, Romania, 7th International Balkan Workshop on Applied Physics - Abstracts, p. 101-102, 1 pp. 2006

Publisher

Ovidius University

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Other information

Language

English

Type of outcome

Stať ve sborníku

Field of Study

10305 Fluids and plasma physics

Country of publisher

Romania

Confidentiality degree

není předmětem státního či obchodního tajemství

RIV identification code

RIV/00216224:14410/06:00015921

Organization unit

Faculty of Education

ISBN

978-80-214-3460-8

UT WoS

000253725400002

Keywords in English

PECVD; Nanostructured silicon-oxide Containing Diamond-like Carbon; thin films; mechanical properties; tribological properties;RBS; ERDA;

Tags

ERDA, mechanical properties, PECVD, RBS, thin films, tribological properties

Tags

International impact, Reviewed

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Abstract

V originále

Deposition and Characterisation of Nanostructured silicon-oxide Containing Diamond-like Carbon Coatings was studied in this work by means of measurements of mechanical, optical and electrical properties of Thin Films.

In Czech

Depozice a charakterizace nanostrukturovaných SiO modifikovaných diamantu-podobných uhlíkových vrstev byla studována pomocí měření mechanických, elektrických a optických vlastností tenkých vrstev.

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Links

GA106/05/0274, research and development project	Name: Víceúrovňové studium vztahů mezi mechanickými a mikrostrukturními charakteristikami materiálů Investor: Czech Science Foundation, Multiscale approach to relationships between mechanical and microstructural characteristics of materials
GA202/05/0607, research and development project	Name: Příprava uhlíkových mikro- a nanostruktur plazmovými technologiemi Investor: Czech Science Foundation, Synthesis of carbon micro- and nanostructures by plasma technologies
MSM0021622411, plan (intention)	Name: Studium a aplikace plazmochemických reakcí v neizotermickém nízkoteplotním plazmatu a jeho interakcí s povrchem pevných látek Investor: Ministry of Education, Youth and Sports of the CR, Study and application of plasma chemical reactions in non-isothermic low temperature plasma and its interaction with solid surface