Detailed Information on Publication Record
2005
Mechanical and optical properties of plasma-polymerized vinyltriethoxysilane
PŘIKRYL, Radek, Ladislav ČECH, Lenka ZAJÍČKOVÁ, Jan VANĚK, S. BEHZADI et. al.Basic information
Original name
Mechanical and optical properties of plasma-polymerized vinyltriethoxysilane
Name in Czech
Mechanické a optické vlastnosti plazmově polymerovaného vinyltrietoxysilanu
Authors
PŘIKRYL, Radek, Ladislav ČECH, Lenka ZAJÍČKOVÁ, Jan VANĚK, S. BEHZADI and F.R. JONES
Edition
Surface & coatings technology, Elsevier Science, 2005, 0257-8972
Other information
Language
English
Type of outcome
Článek v odborném periodiku
Field of Study
10305 Fluids and plasma physics
Country of publisher
Netherlands
Confidentiality degree
není předmětem státního či obchodního tajemství
Impact factor
Impact factor: 1.646
Organization unit
Faculty of Science
UT WoS
000232327800103
Keywords in English
Nanoindentation; Ellipsometry; PACVD; Plasma polymer
Tags
International impact, Reviewed
Změněno: 17/7/2007 17:57, doc. Mgr. Lenka Zajíčková, Ph.D.
V originále
Plasma-polymerized films of vinyltriethoxysilane were deposited by plasma-enhanced chemical vapor deposition using an RF (13.56 MHz) helical coupling plasma system operated in pulsed regime. An effective power was reduced using pulsed plasma in order to decrease the degree of cross-linking of plasma polymer, which resulted in a material of lower Young's modulus. The Young's modulus and hardness of films increased for an enlarging effective power from 5.6 GPa (0.05 W) to 13.7 GPa (25 W) and from 0.8 to 1.7 GPa, respectively, if the time, when plasma is switched on, was fixed at 1 ms. The refractive index at a wavelength of 633 nm increased from 1.47 to 1.58 for those deposition conditions. Enlarging period the elastic modulus decreased for a constant power used.
In Czech
Mechanické a optické vlastnosti plazmově polymerovaného vinyltrietoxysilanu