| PŘIKRYL, Radek, Ladislav ČECH, Lenka ZAJÍČKOVÁ, Jan VANĚK, S. BEHZADI and F.R. JONES. Mechanical and optical properties of plasma-polymerized vinyltriethoxysilane. Surface & coatings technology. Elsevier Science, 2005, vol. 200, 1-4, p. 468-471. ISSN 0257-8972. |
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@article{701728,
author = {Přikryl, Radek and Čech, Ladislav and Zajíčková, Lenka and Vaněk, Jan and Behzadi, S. and Jones, F.R.},
article_number = {1-4},
keywords = {Nanoindentation; Ellipsometry; PACVD; Plasma polymer},
language = {eng},
issn = {0257-8972},
journal = {Surface & coatings technology},
title = {Mechanical and optical properties of plasma-polymerized vinyltriethoxysilane},
volume = {200},
year = {2005}
}
TY - JOUR
ID - 701728
AU - Přikryl, Radek - Čech, Ladislav - Zajíčková, Lenka - Vaněk, Jan - Behzadi, S. - Jones, F.R.
PY - 2005
TI - Mechanical and optical properties of plasma-polymerized vinyltriethoxysilane
JF - Surface & coatings technology
VL - 200
IS - 1-4
SP - 468-471
EP - 468-471
PB - Elsevier Science
SN - 02578972
KW - Nanoindentation
KW - Ellipsometry
KW - PACVD
KW - Plasma polymer
N2 - Plasma-polymerized films of vinyltriethoxysilane were deposited by plasma-enhanced chemical vapor deposition using an RF (13.56 MHz) helical coupling plasma system operated in pulsed regime. An effective power was reduced using pulsed plasma in order to decrease the degree of cross-linking of plasma polymer, which resulted in a material of lower Young's modulus. The Young's modulus and hardness of films increased for an enlarging effective power from 5.6 GPa (0.05 W) to 13.7 GPa (25 W) and from 0.8 to 1.7 GPa, respectively, if the time, when plasma is switched on, was fixed at 1 ms. The refractive index at a wavelength of 633 nm increased from 1.47 to 1.58 for those deposition conditions. Enlarging period the elastic modulus decreased for a constant power used.
ER -
PŘIKRYL, Radek, Ladislav ČECH, Lenka ZAJÍČKOVÁ, Jan VANĚK, S. BEHZADI and F.R. JONES. Mechanical and optical properties of plasma-polymerized vinyltriethoxysilane. \textit{Surface \&{} coatings technology}. Elsevier Science, 2005, vol.~200, 1-4, p.~468-471. ISSN~0257-8972.
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