Deposition of protective couatings in RF organosilicon discharges

ZAJÍČKOVÁ, Lenka, Vilma BURŠÍKOVÁ, Daniel FRANTA, Zuzana KUČEROVÁ, Angelique BOUSQUET, Antoine GOULLET and Agnes GRANIER. Deposition of protective couatings in RF organosilicon discharges. In In Abstracts of Invited Lectures and Contributed Papers, 18th Europhysics Conference on Atomic and Molecular Physics of Ionized Gases. Piacenza, Italy: European Physical Society, 2006, p. 51-54. ISBN 2-914771-38-X.

Basic information

Original name

Deposition of protective couatings in RF organosilicon discharges

Name in Czech

Depozice ochranných povrchů ve vf. organosilikonových výbojích

Authors

ZAJÍČKOVÁ, Lenka (203 Czech Republic, guarantor), Vilma BURŠÍKOVÁ (203 Czech Republic), Daniel FRANTA (203 Czech Republic), Zuzana KUČEROVÁ (203 Czech Republic), Angelique BOUSQUET (250 France), Antoine GOULLET (250 France) and Agnes GRANIER (250 France)

Edition

Piacenza, Italy, In Abstracts of Invited Lectures and Contributed Papers, 18th Europhysics Conference on Atomic and Molecular Physics of Ionized Gases, p. 51-54, 4 pp. 2006

Publisher

European Physical Society

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Other information

Language

English

Type of outcome

Stať ve sborníku

Field of Study

10305 Fluids and plasma physics

Country of publisher

Italy

Confidentiality degree

není předmětem státního či obchodního tajemství

RIV identification code

RIV/00216224:14310/06:00018304

Organization unit

Faculty of Science

ISBN

2-914771-38-X

Keywords in English

deposition-organosilicon-discharge

Tags

deposition-organosilicon-discharge

Tags

International impact

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Abstract

V originále

The aim of the present paer was to study the deposition of protective coatings in RF organosilicon discharges.

In Czech

cílem této publikace bylo studovat depozici ochranných vrstev ve vf. organosilikonových výbojích

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Links

MSM0021622411, plan (intention)	Name: Studium a aplikace plazmochemických reakcí v neizotermickém nízkoteplotním plazmatu a jeho interakcí s povrchem pevných látek Investor: Ministry of Education, Youth and Sports of the CR, Study and application of plasma chemical reactions in non-isothermic low temperature plasma and its interaction with solid surface
1K05025, research and development project	Name: Příprava nových Si-O(N)-C materiálů plazmochemickou metodou Investor: Ministry of Education, Youth and Sports of the CR, Synthesis of new Si-O(N)-C materials by plasmachemical methods