| ZAJÍČKOVÁ, Lenka, Vilma BURŠÍKOVÁ, Daniel FRANTA, Zuzana KUČEROVÁ, Angelique BOUSQUET, Antoine GOULLET and Agnes GRANIER. Deposition of protective couatings in RF organosilicon discharges. In In Abstracts of Invited Lectures and Contributed Papers, 18th Europhysics Conference on Atomic and Molecular Physics of Ionized Gases. Piacenza, Italy: European Physical Society, 2006, p. 51-54. ISBN 2-914771-38-X. |
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@inproceedings{708986,
author = {Zajíčková, Lenka and Buršíková, Vilma and Franta, Daniel and Kučerová, Zuzana and Bousquet, Angelique and Goullet, Antoine and Granier, Agnes},
address = {Piacenza, Italy},
booktitle = {In Abstracts of Invited Lectures and Contributed Papers, 18th Europhysics Conference on Atomic and Molecular Physics of Ionized Gases},
keywords = {deposition-organosilicon-discharge},
language = {eng},
location = {Piacenza, Italy},
isbn = {2-914771-38-X},
pages = {51-54},
publisher = {European Physical Society},
title = {Deposition of protective couatings in RF organosilicon discharges},
year = {2006}
}
TY - JOUR
ID - 708986
AU - Zajíčková, Lenka - Buršíková, Vilma - Franta, Daniel - Kučerová, Zuzana - Bousquet, Angelique - Goullet, Antoine - Granier, Agnes
PY - 2006
TI - Deposition of protective couatings in RF organosilicon discharges
PB - European Physical Society
CY - Piacenza, Italy
SN - 291477138X
KW - deposition-organosilicon-discharge
N2 - The aim of the present paer was to study the deposition of protective coatings in RF organosilicon discharges.
ER -
ZAJÍČKOVÁ, Lenka, Vilma BURŠÍKOVÁ, Daniel FRANTA, Zuzana KUČEROVÁ, Angelique BOUSQUET, Antoine GOULLET and Agnes GRANIER. Deposition of protective couatings in RF organosilicon discharges. In \textit{In Abstracts of Invited Lectures and Contributed Papers, 18th Europhysics Conference on Atomic and Molecular Physics of Ionized Gases}. Piacenza, Italy: European Physical Society, 2006, p.~51-54. ISBN~2-914771-38-X.
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