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@inproceedings{710322,
author = {Meduňa, Mojmír and Novák, Jiří and Holý, Václav and Bauer, Günther and Falub, Claudiu and Tsujino, Soichiro and Grützmacher, Detlev},
address = {Karlsruhe},
booktitle = {XTOP 2006 - 8th Biennial Conference on High Resolution X-Ray Diffraction and Imaging},
keywords = {interdiffusion; x-ray diffraction; thin films},
language = {eng},
location = {Karlsruhe},
pages = {124-124},
publisher = {Forchungszentrum Karlsruhe},
title = {IN-SITU INVESTIGATIONS OF SI AND GE INTERDIFFUSION IN SIGE MULTILAYERS AND CASCADE STRUCTURES},
year = {2006}
}
TY - JOUR
ID - 710322
AU - Meduňa, Mojmír - Novák, Jiří - Holý, Václav - Bauer, Günther - Falub, Claudiu - Tsujino, Soichiro - Grützmacher, Detlev
PY - 2006
TI - IN-SITU INVESTIGATIONS OF SI AND GE INTERDIFFUSION IN SIGE MULTILAYERS AND CASCADE STRUCTURES
PB - Forchungszentrum Karlsruhe
CY - Karlsruhe
KW - interdiffusion
KW - x-ray diffraction
KW - thin films
N2 - We have performed in-situ x-ray reflectivity and diffraction measurements in the range around 700 C. The Ge content profile in SiGe multilayers was used for simulating the x-ray reflectivity or diffraction spectra.
ER -
MEDUŇA, Mojmír, Jiří NOVÁK, Václav HOLÝ, Günther BAUER, Claudiu FALUB, Soichiro TSUJINO and Detlev GRÜTZMACHER. IN-SITU INVESTIGATIONS OF SI AND GE INTERDIFFUSION IN SIGE MULTILAYERS AND CASCADE STRUCTURES. In \textit{XTOP 2006 - 8th Biennial Conference on High Resolution X-Ray Diffraction and Imaging}. Karlsruhe: Forchungszentrum Karlsruhe. p.~124. 2006.
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