| MEDUŇA, Mojmír, Jiří NOVÁK, Claudiu FALUB, Günther BAUER and Detlev GRÜTZMACHER. High Temperature in-situ Investigation of Si/SiGe Multilayers and Cascade Structures. Materials Structure in Chemistry, Biology, Physics and Technology. Praha, 2005, vol. 12, No 2, p. 126. ISSN 1211-5894. |
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@article{710337,
author = {Meduňa, Mojmír and Novák, Jiří and Falub, Claudiu and Bauer, Günther and Grützmacher, Detlev},
article_location = {Praha},
article_number = {2},
keywords = {interdiffusion; x-ray diffraction; reflectivity},
language = {eng},
issn = {1211-5894},
journal = {Materials Structure in Chemistry, Biology, Physics and Technology},
title = {High Temperature in-situ Investigation of Si/SiGe Multilayers and Cascade Structures},
volume = {12},
year = {2005}
}
TY - JOUR
ID - 710337
AU - Meduňa, Mojmír - Novák, Jiří - Falub, Claudiu - Bauer, Günther - Grützmacher, Detlev
PY - 2005
TI - High Temperature in-situ Investigation of Si/SiGe Multilayers and Cascade Structures
JF - Materials Structure in Chemistry, Biology, Physics and Technology
VL - 12
IS - 2
SP - 126
EP - 126
SN - 12115894
KW - interdiffusion
KW - x-ray diffraction
KW - reflectivity
N2 - From the temporal evolution of x-ray reflectivity data at high temperature, we obtained an evolution of Si-SiGe interfaces induced by diffusion. The results of our experiment demonstrate that the critical temperature for Ge inter-diffusion process in Si0.7Ge0.3 and Si0.2Ge0.8 depends not only on Ge content but also on the thickness of the individual layers.
ER -
MEDUŇA, Mojmír, Jiří NOVÁK, Claudiu FALUB, Günther BAUER and Detlev GRÜTZMACHER. High Temperature in-situ Investigation of Si/SiGe Multilayers and Cascade Structures. \textit{Materials Structure in Chemistry, Biology, Physics and Technology}. Praha, 2005, vol.~12, No~2, p.~126. ISSN~1211-5894.
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