| FRANTA, Daniel, Ivan OHLÍDAL, Petr KLAPETEK, Růžena NEPUSTILOVÁ and Svatopluk BAJER. Characterization of polymer thin films deposited on aluminum films by the combined optical method and atomic force microscopy. Surface and Interface Analysis. USA: John Wiley & Sons, 2006, vol. 38, No 4, p. 842-846. ISSN 0142-2421. |
Other formats:
BibTeX
LaTeX
RIS
@article{711185,
author = {Franta, Daniel and Ohlídal, Ivan and Klapetek, Petr and Nepustilová, Růžena and Bajer, Svatopluk},
article_location = {USA},
article_number = {4},
keywords = {ellipsometry; reflectometry; polymer films; AFM},
language = {eng},
issn = {0142-2421},
journal = {Surface and Interface Analysis},
title = {Characterization of polymer thin films deposited on aluminum films by the combined optical method and atomic force microscopy},
volume = {38},
year = {2006}
}
TY - JOUR
ID - 711185
AU - Franta, Daniel - Ohlídal, Ivan - Klapetek, Petr - Nepustilová, Růžena - Bajer, Svatopluk
PY - 2006
TI - Characterization of polymer thin films deposited on aluminum films by the combined optical method and atomic force microscopy
JF - Surface and Interface Analysis
VL - 38
IS - 4
SP - 842-846
EP - 842-846
PB - John Wiley & Sons
SN - 01422421
KW - ellipsometry
KW - reflectometry
KW - polymer films
KW - AFM
N2 - In this paper, the results of the optical characterization of polymer thin films, deposited by the plasma enhanced chemical vapor deposition on the aluminum films performed by the multisample modification of the optical method based on combination of variable angle spectroscopic ellipsometry and near-normal spectroscopic reflectometry, are presented. Within this characterization, the existence of roughness of the boundaries of the polymer films is taken into account by means of the Rayleigh-Rice theory. The optical constants of these films are described by the dispersion model based on parameterization of the density of electronic states. It is shown that the optical constants of the polymer films depend on their thicknesses, i.e. on the deposition times. Morphology of the upper boundaries of the polymer films is also studied using atomic force microscopy.
ER -
FRANTA, Daniel, Ivan OHLÍDAL, Petr KLAPETEK, Růžena NEPUSTILOVÁ and Svatopluk BAJER. Characterization of polymer thin films deposited on aluminum films by the combined optical method and atomic force microscopy. \textit{Surface and Interface Analysis}. USA: John Wiley \&{} Sons, 2006, vol.~38, No~4, p.~842-846. ISSN~0142-2421.
|
