Characterization of polymer thin films deposited on aluminum films by the combined optical method and atomic force microscopy

FRANTA, Daniel, Ivan OHLÍDAL, Petr KLAPETEK, Růžena NEPUSTILOVÁ and Svatopluk BAJER. Characterization of polymer thin films deposited on aluminum films by the combined optical method and atomic force microscopy. Surface and Interface Analysis. USA: John Wiley & Sons, 2006, vol. 38, No 4, p. 842-846. ISSN 0142-2421.

Basic information

Original name

Characterization of polymer thin films deposited on aluminum films by the combined optical method and atomic force microscopy

Name in Czech

Charakterizace polymerních tenkých vrstev deponovaných na hliníkových vrstvách pomocí kombinované optické metody a mikroskopie atomové síly

Authors

FRANTA, Daniel (203 Czech Republic, guarantor), Ivan OHLÍDAL (203 Czech Republic), Petr KLAPETEK (203 Czech Republic), Růžena NEPUSTILOVÁ (203 Czech Republic) and Svatopluk BAJER (203 Czech Republic)

Edition

Surface and Interface Analysis, USA, John Wiley & Sons, 2006, 0142-2421

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Other information

Language

English

Type of outcome

Článek v odborném periodiku

Field of Study

10302 Condensed matter physics

Country of publisher

United States of America

Confidentiality degree

není předmětem státního či obchodního tajemství

Impact factor

Impact factor: 1.427

RIV identification code

RIV/00216224:14310/06:00016537

Organization unit

Faculty of Science

UT WoS

000237437100160

Keywords in English

ellipsometry; reflectometry; polymer films; AFM

Tags

AFM, ellipsometry, polymer films, Reflectometry

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Abstract

V originále

In this paper, the results of the optical characterization of polymer thin films, deposited by the plasma enhanced chemical vapor deposition on the aluminum films performed by the multisample modification of the optical method based on combination of variable angle spectroscopic ellipsometry and near-normal spectroscopic reflectometry, are presented. Within this characterization, the existence of roughness of the boundaries of the polymer films is taken into account by means of the Rayleigh-Rice theory. The optical constants of these films are described by the dispersion model based on parameterization of the density of electronic states. It is shown that the optical constants of the polymer films depend on their thicknesses, i.e. on the deposition times. Morphology of the upper boundaries of the polymer films is also studied using atomic force microscopy.

In Czech

V tomto článku

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Links

FT-TA/094, research and development project	Name: *Vývoj metod pro charakterizaci defektů na površích pevných látek. Investor: Ministry of Industry and Trade of the CR
MSM 143100003, plan (intention)	Name: Studium plazmochemických reakcí v neizotermickém nízkoteplotním plazmatu a jeho interakcí s povrchem pevných látek Investor: Ministry of Education, Youth and Sports of the CR, Study of plasmachemical reactions in non-isothermic low pressure plasma and its interaction with the surface of solid substrates
MSM0021622411, plan (intention)	Name: Studium a aplikace plazmochemických reakcí v neizotermickém nízkoteplotním plazmatu a jeho interakcí s povrchem pevných látek Investor: Ministry of Education, Youth and Sports of the CR, Study and application of plasma chemical reactions in non-isothermic low temperature plasma and its interaction with solid surface