| OHLÍDAL, Ivan, Daniel FRANTA, Martin ŠILER, František VIŽĎA, Miloslav FRUMAR, Jaroslav JEDELSKÝ and Jaroslav OMASTA. Comparison of dispersion models in the optical characterization of As-S chalcogenide thin films. Journal of Non-Crystalline Solids. NORTH-HOLLAND, 2006, vol. 352, 52-54, p. 5633-5641, 8 pp. ISSN 0022-3093. |
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@article{712430,
author = {Ohlídal, Ivan and Franta, Daniel and Šiler, Martin and Vižďa, František and Frumar, Miloslav and Jedelský, Jaroslav and Omasta, Jaroslav},
article_number = {52-54},
keywords = {ellipsometry; chalcogenides},
language = {eng},
issn = {0022-3093},
journal = {Journal of Non-Crystalline Solids},
title = {Comparison of dispersion models in the optical characterization of As-S chalcogenide thin films},
url = {http://hydra.physics.muni.cz/~franta/bib/JNCS352_5633.html},
volume = {352},
year = {2006}
}
TY - JOUR
ID - 712430
AU - Ohlídal, Ivan - Franta, Daniel - Šiler, Martin - Vižďa, František - Frumar, Miloslav - Jedelský, Jaroslav - Omasta, Jaroslav
PY - 2006
TI - Comparison of dispersion models in the optical characterization of As-S chalcogenide thin films
JF - Journal of Non-Crystalline Solids
VL - 352
IS - 52-54
SP - 5633-5641
EP - 5633-5641
PB - NORTH-HOLLAND
SN - 00223093
KW - ellipsometry
KW - chalcogenides
UR - http://hydra.physics.muni.cz/~franta/bib/JNCS352_5633.html
N2 - In this paper, the optical analysis of the As–S thin films prepared under different conditions is performed using three dispersion models for amorphous materials typically employed in practice. The Tauc–Lorentz (TL) model, Urbach–Cody–Lorentz (UCL) model and our model based on the parameterization of the density of electronic states (PDOS model) are namely used to determine the optical parameters of these films. Within the structural model of the As–S films, the existence of the optical constants profiles and overlayers on to the upper boundaries of these films are included. Dispersion and structural models are employed within the analysis based on a combination of variable angle spectroscopic ellipsometry and transmission spectrophotometry in conjunction with multi-sample modification. It is demonstrated that the TL model is not suitable for the optical characterization of the As–S thin films because of the absence of the Urbach tail. Furthermore, it is shown that both the UCL and PDOS models are satisfactory ones for the optical characterization of these films. Moreover, it is also shown that, using the PDOS dispersion model, one can evaluate the material parameters of these As–S films that correspond to the electronic band structure.
ER -
OHLÍDAL, Ivan, Daniel FRANTA, Martin ŠILER, František VIŽĎA, Miloslav FRUMAR, Jaroslav JEDELSKÝ and Jaroslav OMASTA. Comparison of dispersion models in the optical characterization of As-S chalcogenide thin films. \textit{Journal of Non-Crystalline Solids}. NORTH-HOLLAND, 2006, vol.~352, 52-54, p.~5633-5641, 8 pp. ISSN~0022-3093.
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