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@inproceedings{715446,
author = {Dvořák, Pavel and Janča, Jan},
address = {Itálie, Lecce},
booktitle = {Abstracts of Invited Lectures and Contributed Papers of 18th Europhysics Conference on the Atomic and Molecular Physics of Ionised Gases},
keywords = {sheath resistance discharge probe},
language = {eng},
location = {Itálie, Lecce},
isbn = {2-914771-38-X},
pages = {299-300},
publisher = {European Physical Society},
title = {Sheath resistance in RF discharges},
year = {2006}
}
TY - JOUR
ID - 715446
AU - Dvořák, Pavel - Janča, Jan
PY - 2006
TI - Sheath resistance in RF discharges
PB - European Physical Society
CY - Itálie, Lecce
SN - 291477138X
KW - sheath resistance discharge probe
N2 - The sheath resistance in capacitively coupled discharge was studied. The nonlinearity of the sheath for dc current was proved, i.e. the sheath resistance depended on the dc current flowing through the sheath. It was shown, that the nonlinear behaviour can be used in some cases for the approximate evaluation of the plasma parameters, especially in the sheaths, where the interpretation of the Langmuir probe measurements is not reliable.
ER -
DVOŘÁK, Pavel and Jan JANČA. Sheath resistance in RF discharges. In \textit{Abstracts of Invited Lectures and Contributed Papers of 18th Europhysics Conference on the Atomic and Molecular Physics of Ionised Gases}. Itálie, Lecce: European Physical Society, 2006, p.~299-300. ISBN~2-914771-38-X.
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