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@inproceedings{715456,
author = {Doležal, Vojtěch and Dvořák, Pavel and Janča, Jan},
address = {Bratislava},
booktitle = {16th Symposium on Application of Plasma Processes - Book of Abstracts},
keywords = {oxygen; methane; capacitively coupled; plasma},
language = {eng},
location = {Bratislava},
isbn = {978-80-89186-13-6},
pages = {149-150},
publisher = {Union of Slovak Mathematicians and Physicists},
title = {Influence of methane on capacitively coupled oxygen discharge},
year = {2007}
}
TY - JOUR
ID - 715456
AU - Doležal, Vojtěch - Dvořák, Pavel - Janča, Jan
PY - 2007
TI - Influence of methane on capacitively coupled oxygen discharge
PB - Union of Slovak Mathematicians and Physicists
CY - Bratislava
SN - 9788089186136
KW - oxygen
KW - methane
KW - capacitively coupled
KW - plasma
N2 - In this work the mixture of oxygen and a small amount (0-5%) of methane was studied. The measurements were carried out in low-pressure (6.5 Pa) capacitively coupled RF discharge. Positive ions and neutral particles were detected by mass spectrometer and ion energy analyzer. O2+ was the dominating ion in the discharge. Its amount was significantly decreased when a small amount of methane was added. H3O+ and carbon containing ions as C2H7+, CHO+ (C2H5+), CH3+ and CO+ were consequently detected. The flux of neutral particles were composed of dominant O2 which decreased with increasing amount of methane, and expected important product species as H2O, CO2 and CO.
ER -
DOLEŽAL, Vojtěch, Pavel DVOŘÁK a Jan JANČA. Influence of methane on capacitively coupled oxygen discharge. In \textit{16th Symposium on Application of Plasma Processes - Book of Abstracts}. Bratislava: Union of Slovak Mathematicians and Physicists, 2007, s.~149-150. ISBN~978-80-89186-13-6.
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