| DE POUCQUES, Ludovic, Jean-Christophe IMBERT, Carolline BOISSE-LAPORTE, Jean BRETAGNE, Mihai GANCIU, Lionel TEULÉ-GAY, Petr VAŠINA a Michel TOUZEAU. Analysis of the Transport of Ionized Titanium Atoms in a Highly Ionized Sputter Deposition Process. Plasma processes and polymers. Weinheim: Wiley-VCH, 2007, roč. 4/2007, S1, s. S424-S429, 5 s. ISSN 1612-8850. |
Další formáty:
BibTeX
LaTeX
RIS
@article{719105,
author = {de Poucques, Ludovic and Imbert, JeanandChristophe and BoisseandLaporte, Carolline and Bretagne, Jean and Ganciu, Mihai and TeuléandGay, Lionel and Vašina, Petr and Touzeau, Michel},
article_location = {Weinheim},
article_number = {S1},
keywords = {ambipolar difussion; charged particle transport; high power pulsed; magnetron sputtering},
language = {eng},
issn = {1612-8850},
journal = {Plasma processes and polymers},
title = {Analysis of the Transport of Ionized Titanium Atoms in a Highly Ionized Sputter Deposition Process},
volume = {4/2007},
year = {2007}
}
TY - JOUR
ID - 719105
AU - de Poucques, Ludovic - Imbert, Jean-Christophe - Boisse-Laporte, Carolline - Bretagne, Jean - Ganciu, Mihai - Teulé-Gay, Lionel - Vašina, Petr - Touzeau, Michel
PY - 2007
TI - Analysis of the Transport of Ionized Titanium Atoms in a Highly Ionized Sputter Deposition Process
JF - Plasma processes and polymers
VL - 4/2007
IS - S1
SP - S424-S429
EP - S424-S429
PB - Wiley-VCH
SN - 16128850
KW - ambipolar difussion
KW - charged particle transport
KW - high power pulsed
KW - magnetron sputtering
N2 - The paper study transport of ionized sputtered particles by means of time and space resolved optical absorption spectroscopy - we concluded that the transport is govern maainly by ambipolar difussion.
ER -
DE POUCQUES, Ludovic, Jean-Christophe IMBERT, Carolline BOISSE-LAPORTE, Jean BRETAGNE, Mihai GANCIU, Lionel TEULÉ-GAY, Petr VAŠINA a Michel TOUZEAU. Analysis of the Transport of Ionized Titanium Atoms in a Highly Ionized Sputter Deposition Process. \textit{Plasma processes and polymers}. Weinheim: Wiley-VCH, 2007, roč.~4/2007, S1, s.~S424-S429, 5 s. ISSN~1612-8850.
|
