DE POUCQUES, Ludovic, Jean-Christophe IMBERT, Carolline BOISSE-LAPORTE, Jean BRETAGNE, Mihai GANCIU, Lionel TEULÉ-GAY, Petr VAŠINA and Michel TOUZEAU. Analysis of the Transport of Ionized Titanium Atoms in a Highly Ionized Sputter Deposition Process. Plasma processes and polymers. Weinheim: Wiley-VCH, 2007, 4/2007, S1, p. S424-S429, 5 pp. ISSN 1612-8850. |
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@article{719105, author = {de Poucques, Ludovic and Imbert, JeanandChristophe and BoisseandLaporte, Carolline and Bretagne, Jean and Ganciu, Mihai and TeuléandGay, Lionel and Vašina, Petr and Touzeau, Michel}, article_location = {Weinheim}, article_number = {S1}, keywords = {ambipolar difussion; charged particle transport; high power pulsed; magnetron sputtering}, language = {eng}, issn = {1612-8850}, journal = {Plasma processes and polymers}, title = {Analysis of the Transport of Ionized Titanium Atoms in a Highly Ionized Sputter Deposition Process}, volume = {4/2007}, year = {2007} }
TY - JOUR ID - 719105 AU - de Poucques, Ludovic - Imbert, Jean-Christophe - Boisse-Laporte, Carolline - Bretagne, Jean - Ganciu, Mihai - Teulé-Gay, Lionel - Vašina, Petr - Touzeau, Michel PY - 2007 TI - Analysis of the Transport of Ionized Titanium Atoms in a Highly Ionized Sputter Deposition Process JF - Plasma processes and polymers VL - 4/2007 IS - S1 SP - S424-S429 EP - S424-S429 PB - Wiley-VCH SN - 16128850 KW - ambipolar difussion KW - charged particle transport KW - high power pulsed KW - magnetron sputtering N2 - The paper study transport of ionized sputtered particles by means of time and space resolved optical absorption spectroscopy - we concluded that the transport is govern maainly by ambipolar difussion. ER -
DE POUCQUES, Ludovic, Jean-Christophe IMBERT, Carolline BOISSE-LAPORTE, Jean BRETAGNE, Mihai GANCIU, Lionel TEULÉ-GAY, Petr VAŠINA and Michel TOUZEAU. Analysis of the Transport of Ionized Titanium Atoms in a Highly Ionized Sputter Deposition Process. \textit{Plasma processes and polymers}. Weinheim: Wiley-VCH, 2007, 4/2007, S1, p.~S424-S429, 5 pp. ISSN~1612-8850.
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