DE POUCQUES, Ludovic, Jean-Christophe IMBERT, Carolline BOISSE-LAPORTE, Jean BRETAGNE, Mihai GANCIU, Lionel TEULÉ-GAY, Petr VAŠINA and Michel TOUZEAU. Analysis of the Transport of Ionized Titanium Atoms in a Highly Ionized Sputter Deposition Process. Plasma processes and polymers. Weinheim: Wiley-VCH, 2007, 4/2007, S1, p. S424-S429, 5 pp. ISSN 1612-8850.
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Basic information
Original name Analysis of the Transport of Ionized Titanium Atoms in a Highly Ionized Sputter Deposition Process
Name in Czech Studium transportu ionizovaných částic v pulzním IPVD procesu
Authors DE POUCQUES, Ludovic (250 France), Jean-Christophe IMBERT (250 France), Carolline BOISSE-LAPORTE (250 France), Jean BRETAGNE (250 France), Mihai GANCIU (642 Romania), Lionel TEULÉ-GAY (250 France), Petr VAŠINA (203 Czech Republic, guarantor) and Michel TOUZEAU (250 France).
Edition Plasma processes and polymers, Weinheim, Wiley-VCH, 2007, 1612-8850.
Other information
Original language English
Type of outcome Article in a journal
Field of Study 10305 Fluids and plasma physics
Country of publisher United States of America
Confidentiality degree is not subject to a state or trade secret
Impact factor Impact factor: 2.132
RIV identification code RIV/00216224:14310/07:00022169
Organization unit Faculty of Science
UT WoS 000207735200084
Keywords in English ambipolar difussion; charged particle transport; high power pulsed; magnetron sputtering
Tags ambipolar difussion, charged particle transport, high power pulsed, magnetron sputtering
Tags International impact, Reviewed
Changed by Changed by: prof. Mgr. Petr Vašina, Ph.D., učo 21782. Changed: 27/3/2010 09:41.
Abstract
The paper study transport of ionized sputtered particles by means of time and space resolved optical absorption spectroscopy - we concluded that the transport is govern maainly by ambipolar difussion.
Abstract (in Czech)
Studium transportu ionizovaných částic v pulzním IPVD procesu, článek
Links
MSM0021622411, plan (intention)Name: Studium a aplikace plazmochemických reakcí v neizotermickém nízkoteplotním plazmatu a jeho interakcí s povrchem pevných látek
Investor: Ministry of Education, Youth and Sports of the CR, Study and application of plasma chemical reactions in non-isothermic low temperature plasma and its interaction with solid surface
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