| VAŠINA, Petr, Marcel MEŠKO, Jean-Christophe IMBERT, Mihai GANCIU, Caroline BOISSE-LAPORTE, Ludovic DE POUCQUES, Michel TOUZEAU, Daniel PAGNON and Jean BRETAGNE. Experimental study of a pre-ionized high power pulsed magnetron discharge. Plasma Sources Science and Technology. Bristol: Institute of Physics Publishing, 2007, vol. 2007, No 16, p. 501-510. ISSN 0963-0252. |
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@article{719139,
author = {Vašina, Petr and Meško, Marcel and Imbert, JeanandChristophe and Ganciu, Mihai and BoisseandLaporte, Caroline and de Poucques, Ludovic and Touzeau, Michel and Pagnon, Daniel and Bretagne, Jean},
article_location = {Bristol},
article_number = {16},
keywords = {magnetron; sputtering; high power pulses},
language = {eng},
issn = {0963-0252},
journal = {Plasma Sources Science and Technology},
title = {Experimental study of a pre-ionized high power pulsed magnetron discharge},
volume = {2007},
year = {2007}
}
TY - JOUR
ID - 719139
AU - Vašina, Petr - Meško, Marcel - Imbert, Jean-Christophe - Ganciu, Mihai - Boisse-Laporte, Caroline - de Poucques, Ludovic - Touzeau, Michel - Pagnon, Daniel - Bretagne, Jean
PY - 2007
TI - Experimental study of a pre-ionized high power pulsed magnetron discharge
JF - Plasma Sources Science and Technology
VL - 2007
IS - 16
SP - 501-510
EP - 501-510
PB - Institute of Physics Publishing
SN - 09630252
KW - magnetron
KW - sputtering
KW - high power pulses
N2 - The paper study high power impulse magnetron plasma by means of time reselved optical emision spectroscopy and electrical measurements.
ER -
VAŠINA, Petr, Marcel MEŠKO, Jean-Christophe IMBERT, Mihai GANCIU, Caroline BOISSE-LAPORTE, Ludovic DE POUCQUES, Michel TOUZEAU, Daniel PAGNON and Jean BRETAGNE. Experimental study of a pre-ionized high power pulsed magnetron discharge. \textit{Plasma Sources Science and Technology}. Bristol: Institute of Physics Publishing, 2007, vol.~2007, No~16, p.~501-510. ISSN~0963-0252.
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