VAŠINA, Petr, Marcel MEŠKO, Jean-Christophe IMBERT, Mihai GANCIU, Caroline BOISSE-LAPORTE, Ludovic DE POUCQUES, Michel TOUZEAU, Daniel PAGNON and Jean BRETAGNE. Experimental study of a pre-ionized high power pulsed magnetron discharge. Plasma Sources Science and Technology. Bristol: Institute of Physics Publishing, 2007, vol. 2007, No 16, p. 501-510. ISSN 0963-0252. |
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@article{719139, author = {Vašina, Petr and Meško, Marcel and Imbert, JeanandChristophe and Ganciu, Mihai and BoisseandLaporte, Caroline and de Poucques, Ludovic and Touzeau, Michel and Pagnon, Daniel and Bretagne, Jean}, article_location = {Bristol}, article_number = {16}, keywords = {magnetron; sputtering; high power pulses}, language = {eng}, issn = {0963-0252}, journal = {Plasma Sources Science and Technology}, title = {Experimental study of a pre-ionized high power pulsed magnetron discharge}, volume = {2007}, year = {2007} }
TY - JOUR ID - 719139 AU - Vašina, Petr - Meško, Marcel - Imbert, Jean-Christophe - Ganciu, Mihai - Boisse-Laporte, Caroline - de Poucques, Ludovic - Touzeau, Michel - Pagnon, Daniel - Bretagne, Jean PY - 2007 TI - Experimental study of a pre-ionized high power pulsed magnetron discharge JF - Plasma Sources Science and Technology VL - 2007 IS - 16 SP - 501-510 EP - 501-510 PB - Institute of Physics Publishing SN - 09630252 KW - magnetron KW - sputtering KW - high power pulses N2 - The paper study high power impulse magnetron plasma by means of time reselved optical emision spectroscopy and electrical measurements. ER -
VAŠINA, Petr, Marcel MEŠKO, Jean-Christophe IMBERT, Mihai GANCIU, Caroline BOISSE-LAPORTE, Ludovic DE POUCQUES, Michel TOUZEAU, Daniel PAGNON and Jean BRETAGNE. Experimental study of a pre-ionized high power pulsed magnetron discharge. \textit{Plasma Sources Science and Technology}. Bristol: Institute of Physics Publishing, 2007, vol.~2007, No~16, p.~501-510. ISSN~0963-0252.
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