VAŠINA, Petr, Marcel MEŠKO, Jean-Christophe IMBERT, Mihai GANCIU, Caroline BOISSE-LAPORTE, Ludovic DE POUCQUES, Michel TOUZEAU, Daniel PAGNON and Jean BRETAGNE. Experimental study of a pre-ionized high power pulsed magnetron discharge. Plasma Sources Science and Technology. Bristol: Institute of Physics Publishing, 2007, vol. 2007, No 16, p. 501-510. ISSN 0963-0252.
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Basic information
Original name Experimental study of a pre-ionized high power pulsed magnetron discharge
Name in Czech Experimenetální studie preionizovaného pulzního magnetronu velkého výkonu
Authors VAŠINA, Petr (203 Czech Republic, guarantor), Marcel MEŠKO (703 Slovakia), Jean-Christophe IMBERT (250 France), Mihai GANCIU (642 Romania), Caroline BOISSE-LAPORTE (250 France), Ludovic DE POUCQUES (250 France), Michel TOUZEAU (250 France), Daniel PAGNON (250 France) and Jean BRETAGNE (250 France).
Edition Plasma Sources Science and Technology, Bristol, Institute of Physics Publishing, 2007, 0963-0252.
Other information
Original language English
Type of outcome Article in a journal
Field of Study 10305 Fluids and plasma physics
Country of publisher United Kingdom of Great Britain and Northern Ireland
Confidentiality degree is not subject to a state or trade secret
Impact factor Impact factor: 2.120
RIV identification code RIV/00216224:14310/07:00032077
Organization unit Faculty of Science
UT WoS 000249094100010
Keywords in English magnetron; sputtering; high power pulses
Tags high power pulses, magnetron, sputtering
Changed by Changed by: prof. Mgr. Petr Vašina, Ph.D., učo 21782. Changed: 27/3/2010 10:46.
Abstract
The paper study high power impulse magnetron plasma by means of time reselved optical emision spectroscopy and electrical measurements.
Abstract (in Czech)
Experimenetální studie preionizovaného pulzního magnetronu velkého výkonu, článek
Links
MSM0021622411, plan (intention)Name: Studium a aplikace plazmochemických reakcí v neizotermickém nízkoteplotním plazmatu a jeho interakcí s povrchem pevných látek
Investor: Ministry of Education, Youth and Sports of the CR, Study and application of plasma chemical reactions in non-isothermic low temperature plasma and its interaction with solid surface
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