| JAŠEK, Ondřej, Marek ELIÁŠ, Lenka ZAJÍČKOVÁ, Zuzana KUČEROVÁ, Jiřina MATĚJKOVÁ, Antonín REK and Jiří BURŠÍK. Discussion of important factors in deposition of carbon nanotubes by atmospheric pressure microwave plasma torch. Journal of Physics and Chemistry of Solids. Oxford: Elsevier, 2007, vol. 68, 12B, p. 738–743. ISSN 0022-3697. |
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@article{720380,
author = {Jašek, Ondřej and Eliáš, Marek and Zajíčková, Lenka and Kučerová, Zuzana and Matějková, Jiřina and Rek, Antonín and Buršík, Jiří},
article_location = {Oxford},
article_number = {12B},
keywords = {carbon nanotubes; microwave torch;},
language = {eng},
issn = {0022-3697},
journal = {Journal of Physics and Chemistry of Solids},
title = {Discussion of important factors in deposition of carbon nanotubes by atmospheric pressure microwave plasma torch},
volume = {68},
year = {2007}
}
TY - JOUR
ID - 720380
AU - Jašek, Ondřej - Eliáš, Marek - Zajíčková, Lenka - Kučerová, Zuzana - Matějková, Jiřina - Rek, Antonín - Buršík, Jiří
PY - 2007
TI - Discussion of important factors in deposition of carbon nanotubes by atmospheric pressure microwave plasma torch
JF - Journal of Physics and Chemistry of Solids
VL - 68
IS - 12B
SP - 738–743
EP - 738–743
PB - Elsevier
SN - 00223697
KW - carbon nanotubes
KW - microwave torch;
N2 - Deposition of carbon nanotubes in microwave plasma torch at atmospheric pressure is discussed in terms of factors influencing the deposition uniformity and amorphous carbon overlayer formation. The depositions were carried out on silicon substrates with a thin iron catalyst layer from the mixture of argon, methane and hydrogen. Samples were analyzed by scanning electron microscopy (SEM), transmission electron microscopy (TEM) and Raman spectroscopy. Substrate temperature gradients and a size distribution of catalytic particles were main reasons for a deposit non-uniformity. The uniformity was improved by a substrate eating in Ar/H2 discharge before the deposition. The catalyst poisoning with a subsequent amorphous carbon deposition was responsible for the formation of amorphous carbon overlayer containing catalytic particles. Shorter deposition time and optimization of carbon feedstock dilution in hydrogen were suggested for a minimization of this effect.
ER -
JAŠEK, Ondřej, Marek ELIÁŠ, Lenka ZAJÍČKOVÁ, Zuzana KUČEROVÁ, Jiřina MATĚJKOVÁ, Antonín REK and Jiří BURŠÍK. Discussion of important factors in deposition of carbon nanotubes by atmospheric pressure microwave plasma torch. \textit{Journal of Physics and Chemistry of Solids}. Oxford: Elsevier, 2007, vol.~68, 12B, p.~738–743. ISSN~0022-3697.
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