| ŠÍRA, Martin, Vilma BURŠÍKOVÁ, Daniel FRANTA and David TRUNEC. Deposition and analysis of thin films produced in atmospheric pressure glow discharge. In Proceedings of XXVIII International Conference on Phenomena in Ionized Gases. Praha: J.Schmidt, M. Šimek, S.Pekárek, V.Prukner, 2007, p. 713-716. ISBN 978-80-87026-01-4. |
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@inproceedings{724090,
author = {Šíra, Martin and Buršíková, Vilma and Franta, Daniel and Trunec, David},
address = {Praha},
booktitle = {Proceedings of XXVIII International Conference on Phenomena in Ionized Gases},
keywords = {atmospheric pressure glow discharge thin films},
language = {eng},
location = {Praha},
isbn = {978-80-87026-01-4},
pages = {713-716},
publisher = {J.Schmidt, M. Šimek, S.Pekárek, V.Prukner},
title = {Deposition and analysis of thin films produced in atmospheric pressure glow discharge},
year = {2007}
}
TY - JOUR
ID - 724090
AU - Šíra, Martin - Buršíková, Vilma - Franta, Daniel - Trunec, David
PY - 2007
TI - Deposition and analysis of thin films produced in atmospheric pressure glow discharge
PB - J.Schmidt, M. Šimek, S.Pekárek, V.Prukner
CY - Praha
SN - 9788087026014
KW - atmospheric pressure glow discharge thin films
N2 - The atmospheric pressure glow discharge was used for the deposition of thin organosilicon polymer films. The plasma was burning in pure nitrogen used as a carrier gas and a small admixture of organosilicons compounds such as hexamethyldisilazane (HMDSN) or hexamethyldisiloxane (HMDSO) was used as a monomer. The temperature of the substrate was elevated up to 120 C to obtain harder thin films. The homogeneity of thin films was enhanced using movable upper electrode. Electrical measurements were used to distinguish between glow and filamentary regime. Mechanical properties of deposited films were characterised by depth sensing indentation technique. The films were polymer-like, transparent in visible range, with uniform thickness and without pinholes.
ER -
ŠÍRA, Martin, Vilma BURŠÍKOVÁ, Daniel FRANTA and David TRUNEC. Deposition and analysis of thin films produced in atmospheric pressure glow discharge. In \textit{Proceedings of XXVIII International Conference on Phenomena in Ionized Gases}. Praha: J.Schmidt, M. Šimek, S.Pekárek, V.Prukner, 2007, p.~713-716. ISBN~978-80-87026-01-4.
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