J 2007

UV light enhanced oxidation of a-C:H thin film in air: A study of thickness reduction

VALTR, Miroslav, Petr KLAPETEK, Ivan OHLÍDAL and Daniel FRANTA

Basic information

Original name

UV light enhanced oxidation of a-C:H thin film in air: A study of thickness reduction

Name in Czech

Oxidace a-C:H tenké vrstvy pod UV světlem na vzduchu. Studie poklesu tloušťky

Authors

VALTR, Miroslav (203 Czech Republic, guarantor), Petr KLAPETEK (203 Czech Republic), Ivan OHLÍDAL (203 Czech Republic) and Daniel FRANTA (203 Czech Republic)

Edition

Optoelectronics and Advanced Materials - Rapid Communications, Bucharest, INOE & INFM, 2007, 1842-6573

Other information

Language

English

Type of outcome

Článek v odborném periodiku

Field of Study

10305 Fluids and plasma physics

Country of publisher

Czech Republic

Confidentiality degree

není předmětem státního či obchodního tajemství

References:

RIV identification code

RIV/00216224:14310/07:00019537

Organization unit

Faculty of Science

UT WoS

000253725500014

Keywords in English

Amorphous carbon;Thin film;Optical properties;a-C:H;UV enhanced oxidation;Reflectance spectra

Tags

International impact, Reviewed
Změněno: 4/7/2009 18:59, Mgr. Miroslav Valtr, Ph.D.

Abstract

V originále

UV light enhanced oxidation of a-C:H thin film in air: A study of thickness reduction.

In Czech

Oxidace a-C:H tenké vrstvy pod UV světlem na vzduchu. Studie poklesu tloušťky.

Links

KAN311610701, research and development project
Name: Nanometrologie využívající metod rastrovací sondové mikroskopie
Investor: Academy of Sciences of the Czech Republic
MSM0021622411, plan (intention)
Name: Studium a aplikace plazmochemických reakcí v neizotermickém nízkoteplotním plazmatu a jeho interakcí s povrchem pevných látek
Investor: Ministry of Education, Youth and Sports of the CR, Study and application of plasma chemical reactions in non-isothermic low temperature plasma and its interaction with solid surface