Detailed Information on Publication Record
2007
Deposition and Characterization of Nanostructured Silicon-Oxide Containing Diamond-Like Carbon Coatings
BURŠÍKOVÁ, Vilma, Pavel DVOŘÁK, Lenka ZAJÍČKOVÁ, Daniel FRANTA, Jan JANČA et. al.Basic information
Original name
Deposition and Characterization of Nanostructured Silicon-Oxide Containing Diamond-Like Carbon Coatings
Name in Czech
Depozice a charakterizace nanostrukturovaných diamantu-podobných uhlíkových vrstev obsahujících oxid křemíku
Authors
BURŠÍKOVÁ, Vilma (203 Czech Republic, guarantor), Pavel DVOŘÁK (203 Czech Republic), Lenka ZAJÍČKOVÁ (203 Czech Republic), Daniel FRANTA (203 Czech Republic), Jan JANČA (203 Czech Republic), Jiří BURŠÍK (203 Czech Republic), Jaroslav SOBOTA (203 Czech Republic), Petr KLAPETEK (203 Czech Republic), Olga BLÁHOVÁ (203 Czech Republic) and Vratislav PEŘINA (203 Czech Republic)
Edition
Optoelectronics and Advanced Materials - Rapid Communications, Bucharest, INOE & INFM, 2007, 1842-6573
Other information
Language
English
Type of outcome
Článek v odborném periodiku
Field of Study
10305 Fluids and plasma physics
Country of publisher
Romania
Confidentiality degree
není předmětem státního či obchodního tajemství
RIV identification code
RIV/00216224:14310/07:00020754
Organization unit
Faculty of Science
UT WoS
000253725400002
Keywords in English
Nanostructured coatingsů;DLC;Hardness;Adhesion;Fracture toughness
Tags
International impact, Reviewed
Změněno: 3/1/2011 11:26, doc. Mgr. Pavel Dvořák, Ph.D.
V originále
Nanostructured diamond-like carbon coatings with various silicon-oxide content were deposited on different substrate materials (silicon, glass, polycarbonate and steel) in capacitively coupled r.f. discharge (13.56 MHz). The structure of the prepared films was studied with infrared absorption spectroscopy (FTIR) and X-ray photoelectron spectroscopy. Complete atomic compositions, including hydrogen content and film densities, were determined by combination of RBS and ERD analyses. The complex dielectric function of the films was determined from ellipsometric measurements in the range 1.5-5.2 eV. Matrix Assisted Laser Desorption-Ionisation - Time of Flight Mass Spectrometry (MALDI-TOF) was used to study the deposited films. The mechanical properties of prepared coatings (e.g. hardness, elastic modulus, fracture toughness, coating/substrate adhesion etc.) were studied by means of depth sensing indentation technique using Fischerscope H100 tester. The tribological properties were studied using CSM pin-on-disc tester. The effect of intrinsic stress on the coating properties was investigated. The variation in SiOx content enabled to minimize the intrinsic compressive stress in coatings. Analysis of the evolved crack morphology by means of optical microscopy, scanning electron microscopy (SEM) and atomic force microscopy (AFM) revealed a significant increase in interfacial fracture toughness for the DLC:SiOx films compared to the pure DLC films. On the basis of above described investigation nanocomposite multilayer coatings with enhanced mechanical properties (high hardness, adhesion, fracture toughness, low intrinsic stress) were designed.
In Czech
Nanostrukturované diamantu-podobné uhlíkové vrstvy s různým obsahem oxidu křemíku.
Links
| GA106/05/0274, research and development project |
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| MSM0021622411, plan (intention) |
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| 1K05025, research and development project |
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