| STOLYAROVA, Sara, Cherian SUMAN, Roberto RAITERI, Jiří ŽERAVÍK, Petr SKLÁDAL and Yael NEMIROVSKY. Composite Porous Silicon-Crystalline Silicon Cantilevers for Enhanced Biosensing. Sensors and Actuators B Chemical. Amsterdam (Holandsko): Elsevier, 2008, vol. 131, No 1, p. 509-515. ISSN 0925-4005. |
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@article{750333,
author = {Stolyarova, Sara and Suman, Cherian and Raiteri, Roberto and Žeravík, Jiří and Skládal, Petr and Nemirovsky, Yael},
article_location = {Amsterdam (Holandsko)},
article_number = {1},
keywords = {Porous silicon; Microcantilever; Antibody; Silanization; Fluorescence label},
language = {eng},
issn = {0925-4005},
journal = {Sensors and Actuators B Chemical},
note = {doi:10.1016/j.snb.2007.12.038},
title = {Composite Porous Silicon-Crystalline Silicon Cantilevers for Enhanced Biosensing},
volume = {131},
year = {2008}
}
TY - JOUR
ID - 750333
AU - Stolyarova, Sara - Suman, Cherian - Raiteri, Roberto - Žeravík, Jiří - Skládal, Petr - Nemirovsky, Yael
PY - 2008
TI - Composite Porous Silicon-Crystalline Silicon Cantilevers for Enhanced Biosensing
JF - Sensors and Actuators B Chemical
VL - 131
IS - 1
SP - 509-515
EP - 509-515
PB - Elsevier
SN - 09254005
N1 - doi:10.1016/j.snb.2007.12.038
KW - Porous silicon
KW - Microcantilever
KW - Antibody
KW - Silanization
KW - Fluorescence label
N2 - Cantilever transducers, which are recognized as a promising platform for the next generation of chemical and biological sensors, are currently under extensive research. Here we report composite porous silicon-crystalline silicon microcantilevers made of SOI wafers, where the porous silicon surface provides an excellent interface for immobilization of the biosensing layer. We start with crystalline silicon cantilevers fabricated from SOI wafers and we establish a surface layer of porous silicon on the cantilevers by vapor phase stain etching. The processed porous silicon does not introduce signi?cant static bending of the cantilevers indicating that it does not introduce signi?cant residual stress. It does provide an excellent biocompatible material for immobilization of a wide variety of chemical and biological materials, resulting in enhanced sensitivity as demonstrated on the covalently immobilized antibody binding its complementary antigen.
ER -
STOLYAROVA, Sara, Cherian SUMAN, Roberto RAITERI, Jiří ŽERAVÍK, Petr SKLÁDAL and Yael NEMIROVSKY. Composite Porous Silicon-Crystalline Silicon Cantilevers for Enhanced Biosensing. \textit{Sensors and Actuators B Chemical}. Amsterdam (Holandsko): Elsevier, 2008, vol.~131, No~1, p.~509-515. ISSN~0925-4005.
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