MIKULÍK, Petr. Laboratoř polovodičů - čisté prostory pro křemíkovou technologii na MU (Clean room laboratory for silicon device technology at Masaryk University). Tatranská Štrba (Slovensko): DMS-RE, 2007. international workshop.
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Basic information
Original name Laboratoř polovodičů - čisté prostory pro křemíkovou technologii na MU
Name (in English) Clean room laboratory for silicon device technology at Masaryk University
Authors MIKULÍK, Petr (203 Czech Republic, guarantor).
Edition Tatranská Štrba (Slovensko), international workshop, 2007.
Publisher DMS-RE
Other information
Original language Czech
Type of outcome Audiovisual works
Field of Study 10302 Condensed matter physics
Country of publisher Czech Republic
Confidentiality degree is not subject to a state or trade secret
RIV identification code RIV/00216224:14310/07:00023770
Organization unit Faculty of Science
Keywords in English fyzika; mikroelektronika; polovodiče; čisté prostory
Tags fyzika, mikroelektronika, polovodiče, čisté prostory
Tags International impact
Changed by Changed by: doc. RNDr. Petr Mikulík, Ph.D., učo 855. Changed: 31/1/2008 14:23.
Abstract
Prezentace nově otevřené Laboratoře polovodičů - čisté prostory pro křemíkovou technologii, která vznikla na Ústavu fyziky kondenzovaných látek na Masarykově univerzitě.
Abstract (in English)
Presentation of the newly created Clean room laboratory for silicon device technology at Masaryk University, which has been opened in 2007.
Links
MSM0021622410, plan (intention)Name: Fyzikální a chemické vlastnosti pokročilých materiálů a struktur
Investor: Ministry of Education, Youth and Sports of the CR, Physical and chemical properties of advanced materials and structures
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