Detailed Information on Publication Record
2007
Correlation of thermal stability of the mechanical and optical properties of diamond-like carbon films
FRANTA, Daniel, Vilma BURŠÍKOVÁ, Ivan OHLÍDAL, Pavel SŤAHEL, Miloslav OHLÍDAL et. al.Basic information
Original name
Correlation of thermal stability of the mechanical and optical properties of diamond-like carbon films
Name in Czech
Korelace tepelné stability mechanických a optických vlasností diamantu podobných uhlíkových vrstev
Authors
FRANTA, Daniel (203 Czech Republic, guarantor), Vilma BURŠÍKOVÁ (203 Czech Republic), Ivan OHLÍDAL (203 Czech Republic), Pavel SŤAHEL (203 Czech Republic), Miloslav OHLÍDAL (203 Czech Republic) and David NEČAS (203 Czech Republic)
Edition
Diamond and Related Materials, New York, Elsevier, 2007, 0925-9635
Other information
Language
English
Type of outcome
Článek v odborném periodiku
Field of Study
10302 Condensed matter physics
Country of publisher
United States of America
Confidentiality degree
není předmětem státního či obchodního tajemství
Impact factor
Impact factor: 1.788
RIV identification code
RIV/00216224:14310/07:00020890
Organization unit
Faculty of Science
UT WoS
000246608200143
Keywords in English
Thermal stability; Optical constants; Electronic structure; Free-carrier anisotropy
Tags
International impact, Reviewed
Změněno: 4/2/2008 18:33, Mgr. Daniel Franta, Ph.D.
V originále
The aim of the present contribution is the study of the influence of the annealing on the mechanical and optical properties of the plasma deposited diamond-like carbon (DLC) films. The DLC films were prepared for different values of hydrogen content from the mixture of methane and hydrogen in capacitively coupled PECVD reactor. Thermal stability of the films was investigated using sample annealing. The optical properties of the as deposited and annealed DLC films were studied ex situ using variable angle spectroscopic ellipsometry and spectroscopic reflectometry applied within the near-UV, visible and near-IR regions. For optical constants our dispersion model based on parameterization of the densities of electronic states was used. The dependence of the hardness and the elastic modulus on the hydrogen content in the deposition feed was determined using depth sensing indentation technique. It was found that with increasing temperature the sp3-to-sp2 ratio, atomic fraction of hydrogen, hardness and elastic modulus decreased. For the samples prepared with relatively high hydrogen flow rate the annealing helped to minimize the film intrinsic stress. Moreover, these films exhibited free-carrier anisotropy. This fact was respected by including the Drude absorption term into the dispersion model.
In Czech
Cíl prezentovaného příspěvku
Links
| GA106/05/0274, research and development project |
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| MSM0021622411, plan (intention) |
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