GRANIER, A., T. BEGOU, C. DUQUENNE, M.A. DJOUADI, X. FENG, Vilma BURŠÍKOVÁ and Lenka ZAJÍČKOVÁ. Structure and properties of DLC/SiOx films deposited in CW and pulsed plasma. In 18th International Symposium on Plasma Chemistry, Abstracts and Full-Papers CD. Kyoto, Japan: Kyoto University, 2007, p. 1-4. ISBN 978-9903773-2-8. |
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@inproceedings{755339, author = {Granier, A. and Begou, T. and Duquenne, C. and Djouadi, M.A. and Feng, X. and Buršíková, Vilma and Zajíčková, Lenka}, address = {Kyoto, Japan}, booktitle = {18th International Symposium on Plasma Chemistry, Abstracts and Full-Papers CD}, keywords = {DLC;PECVD;HMDSO;mechanical properties}, language = {eng}, location = {Kyoto, Japan}, isbn = {978-9903773-2-8}, pages = {1-4}, publisher = {Kyoto University}, title = {Structure and properties of DLC/SiOx films deposited in CW and pulsed plasma}, year = {2007} }
TY - JOUR ID - 755339 AU - Granier, A. - Begou, T. - Duquenne, C. - Djouadi, M.A. - Feng, X. - Buršíková, Vilma - Zajíčková, Lenka PY - 2007 TI - Structure and properties of DLC/SiOx films deposited in CW and pulsed plasma PB - Kyoto University CY - Kyoto, Japan SN - 978990377328 KW - DLC;PECVD;HMDSO;mechanical properties N2 - Structure and properties of DLC/SiOx films deposited in CW and pulsed plasma ER -
GRANIER, A., T. BEGOU, C. DUQUENNE, M.A. DJOUADI, X. FENG, Vilma BURŠÍKOVÁ and Lenka ZAJÍČKOVÁ. Structure and properties of DLC/SiOx films deposited in CW and pulsed plasma. In \textit{18th International Symposium on Plasma Chemistry, Abstracts and Full-Papers CD}. Kyoto, Japan: Kyoto University, 2007, p.~1-4. ISBN~978-9903773-2-8.
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