| GRANIER, A., T. BEGOU, C. DUQUENNE, M.A. DJOUADI, X. FENG, Vilma BURŠÍKOVÁ and Lenka ZAJÍČKOVÁ. Structure and properties of DLC/SiOx films deposited in CW and pulsed plasma. In 18th International Symposium on Plasma Chemistry, Abstracts and Full-Papers CD. Kyoto, Japan: Kyoto University, 2007, p. 1-4. ISBN 978-9903773-2-8. |
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@inproceedings{755339,
author = {Granier, A. and Begou, T. and Duquenne, C. and Djouadi, M.A. and Feng, X. and Buršíková, Vilma and Zajíčková, Lenka},
address = {Kyoto, Japan},
booktitle = {18th International Symposium on Plasma Chemistry, Abstracts and Full-Papers CD},
keywords = {DLC;PECVD;HMDSO;mechanical properties},
language = {eng},
location = {Kyoto, Japan},
isbn = {978-9903773-2-8},
pages = {1-4},
publisher = {Kyoto University},
title = {Structure and properties of DLC/SiOx films deposited in CW and pulsed plasma},
year = {2007}
}
TY - JOUR
ID - 755339
AU - Granier, A. - Begou, T. - Duquenne, C. - Djouadi, M.A. - Feng, X. - Buršíková, Vilma - Zajíčková, Lenka
PY - 2007
TI - Structure and properties of DLC/SiOx films deposited in CW and pulsed plasma
PB - Kyoto University
CY - Kyoto, Japan
SN - 978990377328
KW - DLC;PECVD;HMDSO;mechanical properties
N2 - Structure and properties of DLC/SiOx films deposited in CW and pulsed plasma
ER -
GRANIER, A., T. BEGOU, C. DUQUENNE, M.A. DJOUADI, X. FENG, Vilma BURŠÍKOVÁ and Lenka ZAJÍČKOVÁ. Structure and properties of DLC/SiOx films deposited in CW and pulsed plasma. In \textit{18th International Symposium on Plasma Chemistry, Abstracts and Full-Papers CD}. Kyoto, Japan: Kyoto University, 2007, p.~1-4. ISBN~978-9903773-2-8.
|
