Mechanical properties of superhard TiB2 coatings prepared by DC
magnetron sputtering

J 2007

Mechanical properties of superhard TiB2 coatings prepared by DC magnetron sputtering

MIKULA, Marián, Branislav GRANČIČ, Vilma BURŠÍKOVÁ, Adrián CSUBA, Milan DRŽÍK et. al.

Basic information

Original name

Mechanical properties of superhard TiB2 coatings prepared by DC magnetron sputtering

Name in Czech

Mechanické vlastnosti supertvrdých TiB2 povlaků připravených DC magnetronovým naprašováním

Authors

MIKULA, Marián (703 Slovakia), Branislav GRANČIČ (703 Slovakia), Vilma BURŠÍKOVÁ (203 Czech Republic, guarantor), Adrián CSUBA (703 Slovakia), Milan DRŽÍK (703 Slovakia), Štefan KAVECKÝ (703 Slovakia), Andrej PLECENIK (703 Slovakia) and Peter KÚŠ (703 Slovakia)

Edition

Vacuum, USA, ELSEVIER (PERGAMON), 2007, 0042-207X

Other information

Language

English

Type of outcome

Článek v odborném periodiku

Field of Study

10302 Condensed matter physics

Country of publisher

Czech Republic

Confidentiality degree

není předmětem státního či obchodního tajemství

Impact factor

Impact factor: 0.881

RIV identification code

RIV/00216224:14310/07:00023835

Organization unit

Faculty of Science

UT WoS

000250891600042

Keywords in English

Magnetron sputtering; Superhard coatings; Mechanical properties; Residual stresses

Abstract

ORIG CZ

V originále

Superhard titanium diboride (TiB2) coatings (Hv> 40 GPa) were deposited in Ar atmosphere from stoichiometric TiB2 target using an unbalanced direct current (d. c.) magnetron. Polished Si (0 0 1), stainless steel, high speed steel (HSS) and tungsten carbide (WC) substrates were used for deposition. The influence of negative substrate bias, Us, and substrate temperature, Ts, on mechanical properties of TiB2 coatings was studied. X ray diffraction (XRD) analysis showed hexagonal TiB2 structure with (0 0 0 1) preferred orientation. The texture of TiB2 coatings was dependent upon the ion bombardment (Us increased from 0 to minus 300 V) and the substrate heating (Ts increased from room temperature (RT) to 700 C). All TiB2 coatings were measured using microhardness tester Fischerscope H100 equipped with Vickers and Berkovich diamond indenters and exhibited high values of hardness Hv up to 34 GPa, effective Young's modulus ranging from 450 to 600 GPa; here E and nu are the Young's modulus and Poisson's ratio, respectively, and elastic recovery We 80%. TiB2 coating with a maximum hardness Hv 73 GPa and E* 580 GPa was sputtered at Us=minus200 V and Ts=RT. Macrostresses of coatings sigma were measured by an optical wafer curvature technique and evaluated by Stoney equation. All TiB2 coatings exhibited compressive macrostresses.

In Czech

Mechanické vlastnosti supertvrdých TiB2 povlaků připravených DC magnetronovým naprašováním

Links

MSM0021622411, plan (intention)

Name: Studium a aplikace plazmochemických reakcí v neizotermickém nízkoteplotním plazmatu a jeho interakcí s povrchem pevných látek

Investor: Ministry of Education, Youth and Sports of the CR, Study and application of plasma chemical reactions in non-isothermic low temperature plasma and its interaction with solid surface

Citovat

MIKULA, Marián, Branislav GRANČIČ, Vilma BURŠÍKOVÁ, Adrián CSUBA, Milan DRŽÍK, Štefan KAVECKÝ, Andrej PLECENIK and Peter KÚŠ. Mechanical properties of superhard TiB2 coatings prepared by DC magnetron sputtering. Vacuum. USA: ELSEVIER (PERGAMON), 2007, vol. 82, No 2, p. 278-281. ISSN 0042-207X.

@article{755355,
   author = {Mikula, Marián and Grančič, Branislav and Buršíková, Vilma and Csuba, Adrián and Držík, Milan and Kavecký, Štefan and Plecenik, Andrej and Kúš, Peter},
   article_location = {USA},
   article_number = {2},
   keywords = {Magnetron sputtering; Superhard coatings; Mechanical properties; Residual stresses},
   language = {eng},
   issn = {0042-207X},
   journal = {Vacuum},
   title = {Mechanical properties of superhard TiB2 coatings prepared by DC magnetron sputtering},
   volume = {82},
   year = {2007}
}

TY  - JOUR
ID  - 755355
AU  - Mikula, Marián - Grančič, Branislav - Buršíková, Vilma - Csuba, Adrián - Držík, Milan - Kavecký, Štefan - Plecenik, Andrej - Kúš, Peter
PY  - 2007
TI  - Mechanical properties of superhard TiB2 coatings prepared by DC magnetron sputtering
JF  - Vacuum
VL  - 82
IS  - 2
SP  - 278-281
EP  - 278-281
PB  - ELSEVIER (PERGAMON)
SN  - 0042207X
KW  - Magnetron sputtering
KW  - Superhard coatings
KW  - Mechanical properties
KW  - Residual stresses
N2  - Superhard titanium diboride (TiB2) coatings (Hv> 40 GPa) were deposited in Ar atmosphere from stoichiometric TiB2 target using an unbalanced direct current (d. c.) magnetron. Polished Si (0 0 1), stainless steel, high speed steel (HSS) and tungsten carbide (WC) substrates were used for deposition. The influence of negative substrate bias, Us, and substrate temperature, Ts, on mechanical properties of TiB2 coatings was studied. X ray diffraction (XRD) analysis showed hexagonal TiB2 structure with (0 0 0 1) preferred orientation. The texture of TiB2 coatings was dependent upon the ion bombardment (Us increased from 0 to minus 300 V) and the substrate heating (Ts increased from room temperature (RT) to 700 C). All TiB2 coatings were measured using microhardness tester Fischerscope H100 equipped with Vickers and Berkovich diamond indenters and exhibited high values of hardness Hv up to 34 GPa, effective Young's modulus ranging from 450 to 600 GPa; here E and nu are the Young's modulus and Poisson's ratio, respectively, and elastic recovery We 80%. TiB2 coating with a maximum hardness Hv 73 GPa and E* 580 GPa was sputtered at Us=minus200 V and Ts=RT. Macrostresses of coatings sigma were measured by an optical wafer curvature technique and evaluated by Stoney equation. All TiB2 coatings exhibited compressive macrostresses.
ER  -

MIKULA, Marián, Branislav GRANČIČ, Vilma BURŠÍKOVÁ, Adrián CSUBA, Milan DRŽÍK, Štefan KAVECKÝ, Andrej PLECENIK and Peter KÚŠ. Mechanical properties of superhard TiB2 coatings prepared by DC magnetron sputtering. \textit{Vacuum}. USA: ELSEVIER (PERGAMON), 2007, vol.~82, No~2, p.~278-281. ISSN~0042-207X.

Detailed Information on Publication Record