| BURŠÍKOVÁ, Vilma, Jiří BURŠÍK, Monika KARÁSKOVÁ, Ondřej JAŠEK, Lenka ZAJÍČKOVÁ, Daniel FRANTA, Petr KLAPETEK and Olga BLÁHOVÁ. Study of Mechanical Properties of NCD Coatings. In VI. ročník konferencie Vrstvy a povlaky 2007. 1st ed. Rožnov pod Radhoštěm: Liss a.s., 2007, p. 1-4. ISBN 978-80-969310-4-0. |
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@inproceedings{755433,
author = {Buršíková, Vilma and Buršík, Jiří and Karásková, Monika and Jašek, Ondřej and Zajíčková, Lenka and Franta, Daniel and Klapetek, Petr and Bláhová, Olga},
address = {Rožnov pod Radhoštěm},
booktitle = {VI. ročník konferencie Vrstvy a povlaky 2007},
edition = {1},
keywords = {Mechanical Properties; NCD Coatings;},
language = {eng},
location = {Rožnov pod Radhoštěm},
isbn = {978-80-969310-4-0},
pages = {1-4},
publisher = {Liss a.s.},
title = {Study of Mechanical Properties of NCD Coatings},
year = {2007}
}
TY - JOUR
ID - 755433
AU - Buršíková, Vilma - Buršík, Jiří - Karásková, Monika - Jašek, Ondřej - Zajíčková, Lenka - Franta, Daniel - Klapetek, Petr - Bláhová, Olga
PY - 2007
TI - Study of Mechanical Properties of NCD Coatings
PB - Liss a.s.
CY - Rožnov pod Radhoštěm
SN - 9788096931040
KW - Mechanical Properties
KW - NCD Coatings;
N2 - The aim of the present paper was to deposit nanocrystalline diamond (NCD) films with low surface roughness, high hardness and fracture toughness by microwave PECVD in the ASTEX type reactor from mixture of methane and hydrogen. The diamond nucleation process was enhanced by RF induced dc self bias of minus 125 V. The interfacial fracture toughness substantially depended on the process of RF induced dc self-bias application. In case of samples when the RF induced dc self-bias was applied after the introduction of methane into the deposition mixture the interfacial fracture toughness was substantially higher becauseof creation of amorphous carbon intermediate layer between the silicon substrate and the nanocrystalline film.
ER -
BURŠÍKOVÁ, Vilma, Jiří BURŠÍK, Monika KARÁSKOVÁ, Ondřej JAŠEK, Lenka ZAJÍČKOVÁ, Daniel FRANTA, Petr KLAPETEK and Olga BLÁHOVÁ. Study of Mechanical Properties of NCD Coatings. In \textit{VI. ročník konferencie Vrstvy a povlaky 2007}. 1st ed. Rožnov pod Radhoštěm: Liss a.s., 2007, p.~1-4. ISBN~978-80-969310-4-0.
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