KLAPETEK, Petr, Vilma BURŠÍKOVÁ and Miroslav VALTR. Scanning probe microscopy analysis of delaminated thin films. Journal of Physics: Conference Series. Institute of Physics (IoP), 2007, vol. 61, No 1, p. 576-581. ISSN 1742-6588. |
Other formats:
BibTeX
LaTeX
RIS
@article{761499, author = {Klapetek, Petr and Buršíková, Vilma and Valtr, Miroslav}, article_number = {1}, keywords = {Scanning probe microscopy; delaminatio; thin films}, language = {eng}, issn = {1742-6588}, journal = {Journal of Physics: Conference Series}, title = {Scanning probe microscopy analysis of delaminated thin films}, volume = {61}, year = {2007} }
TY - JOUR ID - 761499 AU - Klapetek, Petr - Buršíková, Vilma - Valtr, Miroslav PY - 2007 TI - Scanning probe microscopy analysis of delaminated thin films JF - Journal of Physics: Conference Series VL - 61 IS - 1 SP - 576-581 EP - 576-581 PB - Institute of Physics (IoP) SN - 17426588 KW - Scanning probe microscopy KW - delaminatio KW - thin films N2 - In this article the results of atomic force microscopy (AFM) and scaning thermal microscopy (SThM) of delaminated thin films are presented. It is shown that SThM data can be used for a very precise localisation of the delaminated areas that is necessary for the analysis of film material properties. Moreover, by using AFM it is also possible to characterize morphology of the blister upper boundary with a high resolution too. The quantitative results obtained by the above mentioned methods are compared with nanoindentation measurements. ER -
KLAPETEK, Petr, Vilma BURŠÍKOVÁ and Miroslav VALTR. Scanning probe microscopy analysis of delaminated thin films. \textit{Journal of Physics: Conference Series}. Institute of Physics (IoP), 2007, vol.~61, No~1, p.~576-581. ISSN~1742-6588.
|