| KLAPETEK, Petr, Vilma BURŠÍKOVÁ and Miroslav VALTR. Scanning probe microscopy analysis of delaminated thin films. Journal of Physics: Conference Series. Institute of Physics (IoP), 2007, vol. 61, No 1, p. 576-581. ISSN 1742-6588. |
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@article{761499,
author = {Klapetek, Petr and Buršíková, Vilma and Valtr, Miroslav},
article_number = {1},
keywords = {Scanning probe microscopy; delaminatio; thin films},
language = {eng},
issn = {1742-6588},
journal = {Journal of Physics: Conference Series},
title = {Scanning probe microscopy analysis of delaminated thin films},
volume = {61},
year = {2007}
}
TY - JOUR
ID - 761499
AU - Klapetek, Petr - Buršíková, Vilma - Valtr, Miroslav
PY - 2007
TI - Scanning probe microscopy analysis of delaminated thin films
JF - Journal of Physics: Conference Series
VL - 61
IS - 1
SP - 576-581
EP - 576-581
PB - Institute of Physics (IoP)
SN - 17426588
KW - Scanning probe microscopy
KW - delaminatio
KW - thin films
N2 - In this article the results of atomic force microscopy (AFM) and scaning thermal microscopy (SThM) of delaminated thin films are presented. It is shown that SThM data can be used for a very precise localisation of the delaminated areas that is necessary for the analysis of film material properties. Moreover, by using AFM it is also possible to characterize morphology of the blister upper boundary with a high resolution too. The quantitative results obtained by the above mentioned methods are compared with nanoindentation measurements.
ER -
KLAPETEK, Petr, Vilma BURŠÍKOVÁ and Miroslav VALTR. Scanning probe microscopy analysis of delaminated thin films. \textit{Journal of Physics: Conference Series}. Institute of Physics (IoP), 2007, vol.~61, No~1, p.~576-581. ISSN~1742-6588.
|
