| HUMLÍČEK, Josef. In-situ spectroscopic ellipsometry: optimization of monitoring and closed-loop-control procedures. physica status solidi (a), Applied research. Berlin: Akademie-Verlag, 2008, vol. 205, No 4, p. 793-796. ISSN 1862-6300. |
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@article{761944,
author = {Humlíček, Josef},
article_location = {Berlin},
article_number = {4},
keywords = {in situ ellipsometry; monitoring; closed loop control},
language = {eng},
issn = {1862-6300},
journal = {physica status solidi (a), Applied research},
title = {In-situ spectroscopic ellipsometry: optimization of monitoring and closed-loop-control procedures},
volume = {205},
year = {2008}
}
TY - JOUR
ID - 761944
AU - Humlíček, Josef
PY - 2008
TI - In-situ spectroscopic ellipsometry: optimization of monitoring and closed-loop-control procedures
JF - physica status solidi (a), Applied research
VL - 205
IS - 4
SP - 793-796
EP - 793-796
PB - Akademie-Verlag
SN - 18626300
KW - in situ ellipsometry
KW - monitoring
KW - closed loop control
N2 - We discuss optimized extraction of information contained in a series of complex reflectance ratios in a series of consecutive, in-situ SE measurements during the growth of thin films. We present a general computational scheme and discuss guidelines for the optimum data treatment. As an example, we analyze several hundreds of spectra recorded during the growth of diamond-like carbon on TiCN/steel substrate.
ER -
HUMLÍČEK, Josef. In-situ spectroscopic ellipsometry: optimization of monitoring and closed-loop-control procedures. \textit{physica status solidi (a), Applied research}. Berlin: Akademie-Verlag, 2008, vol.~205, No~4, p.~793-796. ISSN~1862-6300.
|
