Measurement of ions in H2 - N2 capacitively coupled discharge

DVOŘÁK, Pavel and Jan JANČA. Measurement of ions in H2 - N2 capacitively coupled discharge. In Proceedings of XXVIII International Conference on Phenomena in Ionized Gases. Praha: J. Schmidt, M. Šimek, S. Pekárek, V. Prukner, 2007, p. 5P09-29, 2 pp. ISBN 978-80-87026-01-4.

Basic information

Original name

Measurement of ions in H2 - N2 capacitively coupled discharge

Name in Czech

Měření iontů v kapacitně vázaném výboji buzeném ve směsi vodíku a dusíku

Authors

DVOŘÁK, Pavel (203 Czech Republic, guarantor) and Jan JANČA (203 Czech Republic)

Edition

Praha, Proceedings of XXVIII International Conference on Phenomena in Ionized Gases, p. 5P09-29, 2 pp. 2007

Publisher

J. Schmidt, M. Šimek, S. Pekárek, V. Prukner

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Other information

Language

English

Type of outcome

Stať ve sborníku

Field of Study

10305 Fluids and plasma physics

Country of publisher

Czech Republic

Confidentiality degree

není předmětem státního či obchodního tajemství

RIV identification code

RIV/00216224:14310/07:00023975

Organization unit

Faculty of Science

ISBN

978-80-87026-01-4

Keywords in English

ions; plasma ; capacitively coupled; hydrogen; nitrogen

Tags

capacitively coupled, Hydrogen, ions, Nitrogen, plasma

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Abstract

V originále

Neutral molecules and especially positive ions and their energy distributions were measured in low-pressure (ca 4 Pa) high frequency (13,56 MHz) capacitively coupled discharge ignited in the mixtures of hydrogen and nitrogen. Especially, the hydrogen-rich mixtures were investigated. Firstly, the energy dependence of the spectrometer was calculated and the ion energy distributions were corrected. The dominant ions were H3+ and HN2+. Ions without hydrogen (N2+ and N+) were significant only at low hydrogen concentration (less than 10%). Also a high amount of ions NH4+ was detected. The nitrogen addition caused a quite steep decrease of the dominant hydrogen ion H3+. Further, an unusual behaviour of NH4+ and H+ was observed. Concerning creation of neutral stable molecules, only a small amount of ammonia was detected.

In Czech

Byly měřeny relativní koncentrace kladných iontů a neutrálních molekul v nízkotlakém kapacitně vázaném plazmatu buzeném ve směsi vodíku a dusíku, zejména ve směsích s převahou vodíku. Dominantními ionty byly částice H3+ a N2H+, ve velkém množství byly přítomné i amonné ionty NH4+.

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Links

MSM0021622411, plan (intention)

Name: Studium a aplikace plazmochemických reakcí v neizotermickém nízkoteplotním plazmatu a jeho interakcí s povrchem pevných látek Investor: Ministry of Education, Youth and Sports of the CR, Study and application of plasma chemical reactions in non-isothermic low temperature plasma and its interaction with solid surface